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Vacuum pump

Inactive Publication Date: 2018-03-01
SHIMADZU CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention reduces the rebounding of particles into semiconductor device chambers.

Problems solved by technology

As a result, this leads to lowering of a quality in semiconductor manufacturing.

Method used

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  • Vacuum pump
  • Vacuum pump
  • Vacuum pump

Examples

Experimental program
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Embodiment Construction

[0026]Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view of one embodiment of a vacuum pump of the present invention, and is a cross-sectional view of an outline configuration of a turbo-molecular pump 1.

[0027]The turbo-molecular pump 1 includes a turbo pump stage having rotor blades 41 and stationary blades 31, and a screw groove pump stage having a cylindrical portion 42 and a stator 32. In the screw groove pump stage, a screw groove is formed at the stator 32 or the cylindrical portion 42. The rotor blades 41 and the cylindrical portion 42 are formed at a pump rotor 4a. The pump rotor 4a is bolt-fastened to a shaft 4b. The pump rotor 4a and the shaft 4b form a rotor unit 4.

[0028]The stationary blades 31 and the rotor blades 41 are alternately arranged in an axial direction. The stationary blades 31 are stacked on each other with a spacer ring 33 being interposed between adjacent ones of the stationary blades 31 in ...

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Abstract

A vacuum pump comprises: a pump rotor rotatably driven by a motor and fastened to a shaft; a recessed portion formed at a suction-port-side end surface of the pump rotor; and a rotor balance correction member including a cover portion configured to cover the recessed portion.

Description

BACKGROUND OF THE INVENTION1. Technical Field[0001]The present invention relates to a vacuum pump.2. Background Art[0002]Typically, a rotor of a turbo-molecular pump is, using a fastening member such as a bolt, fastened to a shaft as a rotor shaft (see, e.g., Patent Literature 1, Japanese Patent No. 3974772). In a turbo-molecular pump described in Patent Literature 1, a recessed portion is formed at a suction-port-side end surface of a rotor, and a bottom portion of the recessed portion is bolt-fastened to a shaft.[0003]In the case of using, as an exhaust pump of a semiconductor manufacturing device such as an etching device, a vacuum pump such as a turbo-molecular pump, particles generated due to a chemical change in a process gas component upon discharge of process gas flow into the vacuum pump through a suction port. As described above, in the case where a recessed portion is formed at a suction-port-side end surface of a rotor, the particles tend to accumulate in the recessed po...

Claims

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Application Information

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IPC IPC(8): F04D29/66F04D29/26
CPCF04D29/266F04D29/662F04D19/042
Inventor KIMURA, HIROAKI
Owner SHIMADZU CORP