Optical fiber interference type device and method for measuring thickness
A technology of thickness measurement and optical fiber interference, which is applied in the field of optical fiber interferometric thickness measurement devices, can solve the problems of complex structure of thickness measurement devices and prone to errors in detection, and achieve the goal of getting rid of signal errors, accurate measurement, and improving signal resolution Effect
Inactive Publication Date: 2008-06-18
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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[0003] In order to overcome the problems of complex structure and error-prone detection in the thickness measuring device in the prior art, the present invention provides an optical fiber interferometric thickness measuring device with simple structure, accurate measurement, and can get rid of the detection error caused by the change of light intensity.
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[0008] Please refer to FIG. 1 , which is an optical fiber interferometric thickness measuring device 100 according to a first embodiment of the present invention. The optical fiber interferometric thickness measuring device 100 includes: a semiconductor laser 110, an optical coupler 120, a first optical fiber 130, a second optical fiber 140, an electro-optic modulator 150, an optical sensor 160, and a signal processor 170 and a sinusoidal signal generator 180 . Wherein, the laser output terminal of the semiconductor laser 110 is connected to the input terminal of the optical coupler 120 . Output ends of the optical coupler 120 are respectively connected to input ends of the first optical fiber 130 and the second optical fiber 140 . The output ends of the first optical fiber 130 and the second optical fiber 140 are respectively provided with a fiber collimator 131 and 141 . The optical fiber collimators 131 and 141 are fixed on a horizontal support arm 191 of a fine-tuning ba...
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The invention relates to an optical-fiber interferometric thickness measurer, comprising a measuring light source, an optical coupler, a first optical-fiber, a second optical-fiber, an electrooptic modulator, an optical sensor, a signal processor and a sinusoidal signal generator, where the measuring light source is connected to the optical coupler, the optical coupler is connected to the input ends of the two optical-fibers, the electrooptic modulator is arranged on one optical-fiber, the optical sensor is connected to the optical coupler and converts an interferometric optical signal containing thickness measuring information into an electric signal containing the thickness measuring information to the signal processor. As compared with the existing techniques, the invention has simple structure and high signal resolution. The invention also relates to a measuring method applying the optical-fiber interferometric thickness measurer.
Description
【Technical field】 [0001] The invention relates to a thickness measuring device and a measuring method thereof, in particular to an optical fiber interference type thickness measuring device. 【Background technique】 [0002] Measuring the thickness of a micro-bump on a plane is a common problem in surface non-destructive testing. When the thickness of the micro-bump is very small, such as a few microns (μm) to tens of microns, a laser is often used as the light source , to detect the reflected light intensity to measure the thickness. This kind of intensity-based detection method often causes detection errors due to the difference in the roughness and reflectivity of the reflective surface. Therefore, after using the reflected light to form interference, the light The detection of the phase difference is converted into thickness information, but this method requires the use of complex and precise optical mirrors, so the system is complex and difficult to adjust. At the same ti...
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IPC IPC(8): G01B11/06
Inventor 林志泉
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD