Deformative reflector

A deformable mirror and silicon film technology, applied in the field of deformable mirrors, can solve the problems of high driving voltage, small deformation, and low driving power, so as to improve the ability to correct the wavefront, save the bonding process, and improve the performance. Effect
CN100434963CInactive Publication Date: 2008-11-19CHINA UNIV OF GEOSCIENCES (WUHAN)
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHINA UNIV OF GEOSCIENCES (WUHAN)
Publication Date
2008-11-19
Estimated Expiration
Not applicable · inactive patent

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Abstract

A variable reflector consists of driving electrode and silicon film .It is featured as setting driving electrode below silicon film, applying 35-45 mu m as distance between driving electrode and silicon film, setting transparent electrode above silicon film and using 6575 mu m as distance between transparent electrode and silicon film, fixing silicon film and transparent electrode separately on mirror surface support and fix-connecting said driving electrode to mirror surface support through supporting column .
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Description

Technical field

[0001] The invention relates to a deformable mirror of an adaptive optical system. Background technique

[0002] A typical adaptive optics system uses a wavefront sensor 2 to detect the distortion of the incident light wave 1, and then sends a control signal to the wavefront correction device through the controller to control the action of the mirror (deformable mirror) 3 to deform the mirror. When the mirror shape and the distortion phase meet the phase conjugate relationship, the distortion will be cancelled out, so that the wavefront is restored, and the resolution of the imaging (CCD) 4 is improved. figure 1 Shown is a typical adaptive optics structure diagram. The deformability and frequency characteristics of the mirror surface affect the performance of the entire optical system.

[0003] The deformable mirror is a key component of the adaptive optics system. The American company Itek first began to develop the deformable mirror and successfully developed t...

Claims

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