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High voltage discharge lamp

A technology for discharge lamps and discharge spaces, which is applied to parts, scarves, clothing, etc. of gas discharge lamps. It can solve problems such as difficult handling and bending of branch tubes 53, and achieve the effect of easy formation of sealing parts and reduction of stress

Active Publication Date: 2009-05-27
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, together with the wrinkling of the metal foil portion 59, there is also a problem that the branch pipe portion 53 is bent.
In addition, if the number of metal foils is increased in order to cope with high current, the gap between the metal foils arranged in the outer peripheral direction of the closing body 60 will become smaller, and there will be a problem that the handling at the time of manufacture will be more difficult.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0018] As a first embodiment of the present invention, figure 1 This is a schematic cross-sectional view showing an enlarged view of a sealing portion. The short-arc discharge lamp 1 of the present invention is composed of a branch portion 3 protruding from a case portion 2 . Furthermore, the inner guide rod 6 is arranged to pass through the tubular body 7 , and the metal body 8 is arranged on the end 6 a side of the guide rod 6 and welded to the guide rod 6 . A metal foil 9 is connected to the metal body 8 , and the metal foil 9 is arranged on the outer periphery of the obturator 10 . and, in figure 1 In , the metal foil 9 is schematically shown, and the actual thickness dimension is, for example, about 20 μm. On the other end side of the metal foil 9 , a second metal body 11 is arranged, and is connected to the metal foil 9 . Furthermore, an external guide rod 13 is connected to the second metal body 11 . And, the outer guide rod 13 is arranged to pass through the sec...

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PUM

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Abstract

Provided is a large sized short arc type electric discharge lamp in which stress generated in the sealing part when the light of the lamp is on can be suppressed, in which the sealing part is not ruptured or the like, and malfunction such as breakage of branch tubes or the like does not occur. In the short arc type electric discharge lamp installed with a mounting part composed of an inside reed rod, a tubular body, a metal body, a metal foil part, a sealing plug, a second metal body, and an outside reed rod, a sealed body in which the metal foil part is sealed with a sealing glass body having a larger inner diameter than the outer diameter of the mounting part is arranged inside the branch tube part with a sealing body, while the branch tube part and the sealing body are welded together.

Description

technical field [0001] The invention relates to short-arc discharge lamps. In particular, it relates to a short-arc discharge lamp having a structure of a sealing portion separating a discharge space from the outside in a large high-input lamp for generating ultraviolet rays used for exposing a semiconductor or a liquid crystal substrate. technical background [0002] Conventionally, metal foils such as molybdenum have been mixed with metal foils such as molybdenum for the purpose of maintaining high lighting pressure and ensuring airtightness between the inside of the discharge space and the outside of the lamp when lighting short-arc discharge lamps used for exposure of semiconductors or liquid crystal substrates. The sealing method of glass sealing. Figure 5 It means a so-called foil-sealed short-arc discharge lamp sealed with a metal foil. This short-arc discharge lamp 51 is composed of a case portion 52 and branch portions 53 protruding from both ends of the case port...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J61/36
CPCA41D23/00
Inventor 西川正晃福田忠司
Owner USHIO DENKI KK