Static measuring device and surface potential sensor

Abstract

The invention provides a device for measuring static electricity, which easily constitute a suitable measuring system, in response to applications, objects to be measured and the like. A surface potential sensor (27) and a displacement sensor (36) are configured so as to be connectable to and disconnectable from each other via amplifier sections (3, 3'). On such the condition that a plurality of surface potential sensors (27, 27...) are in their connected states, the distance data measured by the displacement sensor (36) can be sent to the plurality of surface potential sensors (27, 27...), and each of surface potential sensors (27, 27) computes the surface potential of an object, while compensating a measured potential based on the distance data.

Description

technical field [0001] The present invention relates to an electrostatic measuring device for measuring the surface potential of an object in a non-contact manner, and a surface potential sensor used in the electrostatic measuring device. Background technique [0002] Conventionally, there is an electrostatic measuring device (surface potential measuring device) that measures the potential of static electricity charged on the surface of an insulator without contact (for example, refer to Patent Document 1). [0003] Such an electrostatic measurement device is a device that detects the potential of the sensor electrode by utilizing the phenomenon that a potential of a level corresponding to the surface potential of the object is generated on the sensor electrode disposed opposite to the object due to electrostatic induction. Potential level to measure the surface potential of the object. [0004] Patent Document 1: JP Unexamined Patent Publication No. 8-129043 [0005] The ...

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Problems solved by technology

[0007] In this way, since the sensor unit for potential measurement and the sensor unit for distance measurement are housed in the same housing to constitute the sensor unit, when the object to be measured is enlarged to a planar shape and cannot be measured with one sensor unit, it is necessary to Multiple sensor units and multiple main units that process their signals, presenting difficulties that increase cost

[0008] In addition, it is impossible to distinguish and use the distance measuring sensor unit based on various detection principles such as the laser method and the ultrasonic method according to the object to be measured, so it is difficult to configure a system according to the object to be measured and the application.

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