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Apparatus for measuring thickness of glass substrate

A glass substrate and equipment technology, applied in the field of thickness measurement equipment, can solve problems such as the inability to provide measurement

Inactive Publication Date: 2007-10-10
NISHIYAMA STAINLESS CHEMICAL KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the glass surface of the moving glass substrate has slight fluctuations in the conveying path, which prevents conventional equipment from providing accurate measurements

Method used

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  • Apparatus for measuring thickness of glass substrate
  • Apparatus for measuring thickness of glass substrate
  • Apparatus for measuring thickness of glass substrate

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Embodiment Construction

[0022] The present invention will now be described in detail with reference to preferred embodiments. FIG. 1 is a block diagram showing a post-processing apparatus EQU equipped with a thickness measuring apparatus 40 embodying the invention. In FIG. 1 , a plan view (a), a front view (b), and a left elevation view (c) are illustrated. In this post-processing equipment EQU, the glass substrate thinned by the chemical polishing process is sequentially subjected to washing treatment, drying treatment, and thickness measurement treatment.

[0023] In this embodiment, the laminated glass substrate GL for a liquid crystal display is assumed without limitation as a glass substrate GL (see FIG. 9 ), in which a liquid crystal confinement region 61 is provided between two glass substrates 60 , 60 in the display. A chemical polishing process, such as but not limited to, is performed by immersing the laminated glass substrate GL in a fluorinated acid-based polishing solution with its peri...

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PUM

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Abstract

A thickness measuring apparatus 40 is provided which receives a laminated glass substrate GL for use in flat panel display having subjected to thinning process, and measures thickness of the glass substrate in a plurality of inspection lines LN1-LN3. Provided are three sets of displacement sensors Si arranged orthogonally to a conveyance path in which the glass substrate is conveyed, on the sides of front and back faces of the glass substrate; a first means that calculates clearances Dl, D2 between each sensor and a face of the glass substrate GL based on an output signal from the displacement sensor; and a second means that calculates thickness T of the glass substrate being conveyed based on a value calculated in the first means and clearance DO of a pair of sensors determined in advance. According to the present invention, it is possible to accurately measure thickness even for a thinned glass substrate.

Description

technical field [0001] The present invention relates to a thickness measuring apparatus capable of accurately measuring the thickness of a thin glass substrate processed, for example, by chemical polishing, while conveying the glass substrate. Background technique [0002] "Flat panel display" (hereinafter abbreviated as "FPD") is a term used in contrast to a display device with a bulky shape such as a Braun tube of a CRT display, which is characterized by a small thickness and saves space, and a small thickness of a display panel. FPDs have been put into practical use as liquid crystal displays, plasma displays, and organic EL displays. Among FPDs, liquid crystal displays in particular have been widely used not only as TV sets but also as display devices for portable phones and computer devices. [0003] In recent years, in order to meet the demand for developing light-weight and thin liquid crystal displays, there has been a tendency to use a chemical polishing technique ...

Claims

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Application Information

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IPC IPC(8): G01B11/06
CPCG01B11/06G01M11/025G01N33/386G01N2021/0181G05B2219/10
Inventor 西山智弘
Owner NISHIYAMA STAINLESS CHEMICAL KK
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