Method to reduce microwave plasma excitated difficulty

Abstract

The present invention relates to a method for reducing the exciting difficulty of the microwave plasma, belonging to microwave plasma exciting technical filed. The method comprises the steps as follows: insert a jet ionization tube into a normal microwave reaction cavity; the ionization tube is internally filled with working gas; the jet ionization tube is added with voltage gradually until the gas discharges to make the jet ionization tube produce ionization current; adjust the work voltage of the jet ionization tube to blow the ionization current to the high filed area inside the reaction cavity; the reaction cavity is internally filled microwave until the plasma unit is excited; adjust the microwave energy to remain the plasma; and then close the voltage of the jet ionization tube. The present invention can reduce the difficulty of exciting the plasma reaction cavity under anticyclonic pressure or atmospheric pressure, which promotes the practical appliance of the microwave plasma.

Description

technical field [0001] The invention belongs to the technical field of microwave plasma excitation, in particular to a microwave plasma excitation method. Background technique [0002] Plasma has strong practical value in the fields of new materials, microelectronics industry, and biological research, especially the way of using microwaves to excite plasma. Compared with other plasma excitation methods, under high pressure (>10 4 The existence range of Pa) plasma can be controlled larger, the density of charged particles is higher, it is relatively easy to maintain, and there is a lot of room for application expansion. At present, under low pressure environment (<10 4 Pa) The acquisition and application technology of microwave plasma has gradually matured, but in the field of high pressure or atmospheric pressure, only the method of using microwave plasma torch to obtain plasma is relatively mature, but the volume of plasma obtained by this method is limited, which is...

AI Technical Summary

Problems solved by technology

At present, under low pressure environment (4 Pa) The acquisition and application technology of microwave plasma has gradually matured, but in the field of high pressure or atmospheric pressure, only the method of using microwave plasma torch to obtain plasma is relatively mature, but the volume of plasma obtained by this method is limited, which is not suitable for industrial needs

The use of a larger microwave reaction chamber to excite the plasma can ensure the volume of the plasma, but because the related research is still in its infancy, the quality factor of the existing chamber is low, and the ideal chamber is currently used to excite argon under atmospheric pressure. It also requires 2kW microwave input to generate a plasmoid, and generally requires more than 4kW to excite argon-air mixed gas, and requires higher energy to excite air under atmospheric pressure, which limits the application of the cavity.

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