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Photon crystal tunable filter and its manufacture method

A technology for tuning filters and photonic crystals, which is applied in semiconductor/solid-state device manufacturing, coupling of optical waveguides, and instruments. Effects for easy integration

Inactive Publication Date: 2010-05-12
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this tunable filter is structurally tuned using the photonic bandgap effect, so the size of the air holes that make up the photonic crystal is very small, which increases the difficulty of fabrication

Method used

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  • Photon crystal tunable filter and its manufacture method
  • Photon crystal tunable filter and its manufacture method
  • Photon crystal tunable filter and its manufacture method

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Embodiment Construction

[0046] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0047] The photonic crystal tunable filter provided by the present invention is an ultra-small three-dimensional photonic crystal thermo-optic tunable filter, which is to make a two-dimensional defect photonic crystal structure on the basis of a one-dimensional photonic crystal filter. The step change is used for lateral limitation and optical frequency selection, and the way of optical heating is used to realize thermo-optical tuning.

[0048] The photonic crystal filter provided by the present invention consists of a lower reflection mirror, a spacer layer and an upper reflection mirror grown sequentially on a silicon-on-insulator (SOI) substrate, and the upper reflection mirror, the spacer layer, the lower reflection mi...

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Abstract

The invention relates to the technical field of thermo-optical tuned filter, and discloses a photon crystal tunable filter, comprising a lower reflector, a separation wall and an upper reflector on the silicon on an insulation layer (SOI) and air ports through the upper reflector, the separation wall, the lower reflector and the top silicon of SOI. The invention also discloses a preparation methodfor the photon crystal tunable filter. With the method, the invention can reduce the uneven film temperature from the traditional heating of film resistance, lift the limit of the minimum size of input light spot caused by the diffraction loss, lower the consumption and the power of the tunable filter and accelerate the tuning speed of the tunable filter.

Description

technical field [0001] The invention relates to the technical field of thermo-optical tuning filters, in particular to a photonic crystal tunable filter and a manufacturing method thereof. The photonic crystal tunable filter is an ultra-small three-dimensional photonic crystal thermo-optic tuning filter, which realizes thermo-optic tuning by means of light heating. Background technique [0002] With the urgent demand for high-speed and large-capacity communication networks such as Internet access, high-quality image transmission, and multimedia technology, the Dense Wavelength Division Multiplexing (DWDM) system is the best solution for the rapid growth of communication network bandwidth. It has become an important technology in the current point-to-point network, and at the same time, narrower frequency intervals and more multiplexing channels have always been the goals that people are relentlessly pursuing. [0003] In this large-capacity DWDM system, if an optical filter...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/122G02B6/42G02F1/01G03F7/16G03F7/20G03F7/26
Inventor 唐海侠左玉华余金中王启明
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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