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Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof

A determination method and mode technology, which is applied in the field of determination of the width of the mode-excited cantilever micro-beam and its mode shape electrode, can solve the problems affecting the reliability of the simulation, and achieve the effect of simple structure and high test accuracy

Inactive Publication Date: 2011-04-27
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Obviously, this kind of error is insurmountable, and directly affects the reliability of simulation in some working conditions

Method used

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  • Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof
  • Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof
  • Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof

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Embodiment Construction

[0014] Such as figure 1 As shown, the present invention modally excites the cantilever microbeam, including the elastic microbeam 1, the cantilever support module 2, and the mode shape electrode 3, wherein one end of the elastic microbeam 1 is fixed on the upper surface of the cantilever support module 2, and the cantilever support module 2 The lower surface of the bottom surface is fixed to the substrate, the mode shape electrode 3 is located directly under the elastic microbeam 1, and the mode shape electrode 3 is fixed on the substrate.

[0015] Such as figure 2 As shown, taking the construction of the first-order modal function as an example. The method for determining the width of the mode shape electrode of the mode-excited cantilever micro-beam comprises the following steps:

[0016] a) Determine the length of the cantilever microbeam as l along the x direction, the width along the z direction as b, and the thickness along the y direction as h δ , the modal shape el...

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Abstract

The invention discloses a modality excitation cantilever micro beam, and a width determination method for a modality electrode thereof, and belongs to the field of MEMS. The modality excitation cantilever micro beam comprises an elastic micro beam, a cantilever support module, and a modality electrode. The width determination method for the modality electrode comprises the steps of determining the dimension of the cantilever micro beam; applying voltage between the elastic micro beam and a drive electrode through the cantilever support modules; and adopting a modality functional curve as the basic shape of the drive electrode to obtain the width of the modality electrode. The micro beam has a simple structure, can select the modality exponent number as required, can not cause modality truncation error and has high measuring accuracy.

Description

technical field [0001] The invention relates to a mode-excited cantilever micro-beam and a method for determining the width of mode-shaped electrodes thereof, belonging to the field of micro-electromechanical systems (MEMS). Background technique [0002] Electrostatically actuated cantilever microbeams are the core of many MEMS devices, such as microbeam resonators and filters. Such microbeams usually vibrate at some natural frequency, most commonly at the first natural frequency. The electrostatic excitation frequency is the natural frequency of this order. At present, the driving electrodes of this type of microbeam are all designed to have a fixed width (the shape of the driving electrodes is all rectangular, for example: M.I.Younis, E.M.Abdel-Rahman, AliNayfeh.A Reduced-Oder Model for Electrically Actuated Microbeam-Based MEMS, Journal of Microelectromechanical Systems, vol.12, no.5, pp.672-680, 2003; E.M.Abdel-Rahman, M.I.Younis, Ali Nayfeh.Characterization of the mec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H13/00H03H3/10B81B3/00B81C5/00B81C99/00
Inventor 李普方玉明
Owner SOUTHEAST UNIV