Continuous feeding apparatus of silicon monocrystal stove and silicon monocrystal stove equipped with the same

Abstract

The invention discloses a continuous feeding device for a silicon single crystal furnace and the silicon single crystal furnace which is provided with the device and relates to corollary equipment for the silicon single crystal furnace. The device comprises a feed cylinder (7) which is provided with a lug boss (8), the outer surface at the upper end of the lug boss extends inwards, the bottom edge of the feed cylinder (7) turns inward and is blocked and provided with a silicon chip (6), two ends of an outer sleeve (4) for a compressive rod are fixed and arranged in the feed cylinder (7) by anupper flat steel sheet and a lower flat steel sheet (9 and 10), the outer sleeve (4) for the compressive rod is internally provided with the compressive rod (5) which can move up and down in the outer sleeve (4) for the compressive rod, the upper end of the compressive rod (5) is provided with a compressive rod pulley (3), one end of a control link (2) which is arranged on the upper flat steel sheet (9) by a pin axis (11) supports and is connected with the outer surface of the compressive rod pulley (3), and the other end thereof is connected with a pulley (1) for an operating mechanism. The device has simple structure and can feed to a silica spot continuously without opening the furnace, thus improving the yield and rate of finished product of the silicon single crystal furnace and reducing energy consumption and cost.

Description

technical field [0001] The invention relates to supporting equipment for a silicon single crystal furnace, in particular to a continuous feeding device for a silicon single crystal furnace and a silicon single crystal furnace equipped with the device. Background technique [0002] The silicon single crystal furnace is currently working with a decompression crystal pulling process. During the silicon single crystal pulling process, high-purity argon is continuously fed into the single crystal furnace at a constant speed, and the mechanical pump is continuously flowing from the furnace to the furnace. External pumping keeps the pressure inside the furnace stable at about 1333Pa. This process not only has the characteristics of vacuum technology-maintaining negative pressure in the furnace, but also has the characteristics of flowing atmosphere technology-continuous inflation and exhaust. Since the temperature in the single crystal furnace is as high as 1420°C, and the crystal ...

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Problems solved by technology

[0003] At present, there are two common continuous feeding devices for silicon single crystal furnaces in the domestic market. One is made of quartz glass, which has the following defects: first, high cost and complicated manufacturing process; second, quartz glass is easy to break , the service life is short; third, the structure of the opening at the lower end of the barrel is complicated, the operation is troublesome, and sometimes the continuous feeding fails because the opening at the lower end cannot be opened.

It has great potential safety hazards: first, the hinge that fixes the three-lobe leaf is prone to deformation at high temperature, resulting in incomplete opening of the three-lobe leaf and preventing the silicon material from falling completely; sometimes the deformation of the hinge will cause the three-lobe leaf to fall off The connection with the wall of the barrel falls into the molten silicon, causing the silicon material in a crucible to be scrapped; second, in order to ensure that the lowest point of the three-lobed blade has a certain safety distance from the molten silicon liquid surface, the height of the barrel must be raised , causing the silicon material to leave the molten silicon liquid level too high, often causing the molten silicon to splash out of the liquid surface during continuous feeding, resulting in the loss of silicon material and damage to graphite parts; third, due to the accumulation of silicon material in the barrel, It often happens that the silicon material is stuck and cannot fall down, and the barrel valve is used to beat the barrel, sometimes causing the vertical rod to fall into the crucible, resulting in a serious loss

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