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Liquid droplet discharging apparatus, liquid discharging method, color filter producing method, and organic el device producing method

一种制造方法、液滴的技术，应用在对表面涂布液体的装置、半导体/固态器件制造、滤光片等方向，能够解决喷出状态差、喷出不均等问题

Active Publication Date: 2009-10-07
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, a difference in discharge state occurs between liquid bodies, which may be recognized as discharge unevenness

Method used

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  • Liquid droplet discharging apparatus, liquid discharging method, color filter producing method, and organic el device producing method
  • Liquid droplet discharging apparatus, liquid discharging method, color filter producing method, and organic el device producing method
  • Liquid droplet discharging apparatus, liquid discharging method, color filter producing method, and organic el device producing method

Examples

Experimental program
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Effect test

Embodiment approach 1

[0055]

[0056] First of all, refer to Figure 1 ~ Figure 6 A description will be given of the droplet ejection device of this embodiment. figure 1 It is a schematic perspective view showing the structure of a droplet ejection device.

[0057] Such as figure 1 As shown, the droplet ejection device 10 includes: a workpiece moving mechanism 20 as a first moving mechanism that moves the workpiece W in the main scanning direction (X-axis direction) as the first direction; The head moving mechanism 30 as the second moving mechanism moves in the sub-scanning direction (Y-axis direction) which is the second direction orthogonal to the direction.

[0058] The workpiece moving mechanism 20 includes a pair of guide rails 21, a moving table 22 that moves along the pair of guide rails 21, and a stage 5 on which a workpiece W arranged on the moving table 22 via a rotating mechanism 6 is placed.

[0059] The moving table 22 uses an air piston and a linear motor (not shown) provided inside the...

Embodiment approach 2

[0145]

[0146] Refer to Picture 12 and Figure 13 A description will be given of a method of manufacturing an organic EL device to which the liquid ejection method of the first embodiment described above is applied. Picture 12 It is a schematic cross-sectional view showing the main structure of the organic EL device, Figure 13 (a) to (f) are schematic cross-sectional views showing a method of manufacturing an organic EL device.

[0147]

[0148] Such as Picture 12 As shown, the organic EL device 600 of this embodiment includes an element substrate 601 having a light-emitting element portion 603 as an organic EL element, and a sealing substrate 620 sealed with the element substrate 601 and a space 622 interposed therebetween. In addition, the element substrate 601 includes a circuit element portion 602 on the element substrate 601, and the light emitting element portion 603 is formed by overlapping the circuit element portion 602 and is driven by the circuit element portion ...

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Abstract

The present invention provides a liquid droplet discharging apparatus for discharging specified amount of liquid to film formation regions stably in consideration of uneven injection of liquid droplet from plurality of nozzles, a liquid discharging method, a color filter producing method using the same, and an organic EL device producing method. The liquid droplet discharging apparatus (10) includes a workpiece moving mechanism (20) that makes the workpieces (W) move along a primary scanning direction; a head moving mechanism (30) that makes a sliding guide (8) move along a sub scanning direction orthogonal with the primary scanning direction; a plurality of nozzles carried by the sliding guide (8); a nozzle driving section that applies a drive signal to the plurality of nozzles; a control section (40) that controls theses above, which control the nozzle driving section via changing the driving signal applied to the driving units corresponding to nozzles positioned over the film formation region among the nozzles in each of the scanning operations.

Description

Technical field [0001] The present invention relates to a liquid droplet ejection device that ejects and draws liquid droplets onto an object to be ejected, a liquid ejection method, a method of manufacturing a color filter using these, and a method of manufacturing an organic EL device. Background technique [0002] In recent years, the technology of using the droplet ejection method to eject a liquid containing a functional material onto an object to be ejected such as a substrate as droplets to manufacture various functional devices has attracted attention. As representative functional devices, color filters or organic EL (Electro Luminessence) elements can be cited. [0003] In such a functional device, in order to obtain desired characteristics, one of the important issues is how to form a uniform and uniform functional film on the object to be ejected. As a manufacturing method that can realize this, there is known a color filter manufacturing method having the following st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/01B41J2/07G02B5/23H01L51/00B05C5/00B05D1/26B05D7/00G02B5/20G09F9/00H05B33/10H10K99/00
CPCB41J3/28B41J3/407B41J2/2139
Inventor 筱原亨
Owner TOKYO ELECTRON LTD
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