Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror

An off-axis aspheric surface and processing efficiency technology, applied in metal processing equipment, manufacturing tools, turning equipment, etc., can solve the problems of difficult to process off-axis aspheric mirrors, etc., and achieve the effects of easy separation, high processing efficiency and simple method.

Inactive Publication Date: 2010-03-17
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the research on this processing technology is still in its infancy, and it is still difficult to process off-axis aspheric mirrors with high shape accuracy due to the limitation of free-form surface shape error analysis and evaluation methods.

Method used

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  • Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror
  • Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror
  • Method for improving shape accuracy and processing efficiency of off-axis aspheric mirror

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Embodiment Construction

[0018] Because the off-axis aspheric mirror is a part of the aspheric surface, for the off-axis aspheric surface with small size or small Sag, the ultra-precision machining of the off-axis aspheric surface can be completed by processing the whole aspheric surface. parent body" processing method. figure 1 is a schematic diagram of processing. In this method, the entire aspheric surface is the processing "parent body", and n through holes are evenly distributed on it, and the off-axis aspheric surface "sub-body" to be processed is placed in the opening part, and the aspheric surface parent body They form a complete aspheric surface together, and perform ultra-precision turning processing at the same time, and process multiple off-axis aspheric surfaces at one time. There is an appropriate amount of space between adjacent holes, which is used for ultra-precision measurement during the compensation process, and realizes the control of the overall compensation machining allowance. ...

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Abstract

The invention belongs to the technical field of optical device manufacturing and relates to a method for improving shape accuracy and processing efficiency of an off-axis aspheric mirror, comprising the following steps: (1) designing a rotary aspheric surface as well as a primary and secondary consubstantial structure for the primary body according to the size and the dimension of the off-axis aspheric mirror to be processed, i.e. a secondary body, and determining the amount of the off-axis aspheric secondary bodies to be processed at one time; (2) disposing through holes on a primary body blank piece; (3) placing all secondary body blank pieces into the through holes and fixing on a lathe after integrating into a cylindrical integrated work piece, and processing a spherical surface closest to the rotary aspheric surface on the integrated work piece; (4) generating a processing path of cutting tools based on the shape of the rotary aspheric surface, reprocessing the spherical surface by utilizing an ultra-precision lathe and carrying out form error analysis and compensating processing according to the measured integrated rotary aspheric surface shape. The provided method is simpleand easy to realize, has the advantages of high-efficiency, easy detachability and high shape accuracy and can realize high-efficient processing on an off-axis aspheric surface with high shape accuracy.

Description

technical field [0001] The invention belongs to the technical field of optical device manufacturing, and relates to a processing method of an off-axis aspheric mirror. Background technique [0002] The optical system using the off-axis aspheric mirror structure has the characteristics of fewer components, no obstruction, long focal length, large field of view, wide band, strong ability to suppress stray light, and high modulation transfer function. It is indispensable for space optical systems, astronomy and high-precision measurement systems. missing optics. The three-mirror reflection system is its most typical application. As the core component of the space telescope, it can avoid central occlusion, reduce the volume and weight of the system, and improve the imaging quality of the system at the same time. The off-axis aspheric mirror can also be used as a lithography objective lens in extreme ultraviolet lithography (EUVL), and cooperate with other optical elements to in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23B1/00B23B5/00
Inventor 房丰洲张效栋
Owner TIANJIN UNIV
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