Integrated manufacturing method of microminiature parts based on surface coating

Abstract

The invention relates to an integrated manufacturing method of microminiature parts based on surface coating. The technology integrates multiple technologies such as precision machining / ultraprecision machining, surface coating, precision measurement and the like, adopts the parts precision machining mode of firstly '-'(removing machining) and then '+' (combination machining), and compensates the sizes of parts through accurately controlling the thickness of a coating (plating) layer on the basis of precision measurement, thus improving machining precision and surface quality considering that the thickness of the coating layer can be precisely controlled to be in the nanometer level. The precision / ultraprecision machining technologies have wide range of machining materials and simple method, and can realize mass production of microminiature parts with three-dimensional complex structures; and the method of the invention be widely applied to the machining of various microminiature parts such as steel, alloy and the like.

Description

Technical field [0001] The invention relates to a method for manufacturing micro-small parts, in particular to an integrated manufacturing method for micro-small parts based on surface coating. Background technique [0002] With the development of aerospace, defense industry, precision instruments, medicine and bioengineering technology, as an important development direction of advanced manufacturing technology, micro-parts manufacturing technology has attracted more and more attention from scholars from all over the world. Due to the advantages of small size, light weight, low energy consumption, and low inertia, parts have become more and more widely used. [0003] Nowadays, there are two main methods for manufacturing micro-small parts. One is the more mature microelectronics technology represented by silicon microprocess and LIGA technology, namely MEMS technology, and the other method is mainly based on traditional precision machining as a background manufacturing technology,...

AI Technical Summary

Problems solved by technology

However, this processing method generally has problems such as single processing materials, and the three-dimensional body processing ability is poor, and it can only process two-dimensional or quasi-three-dimensional micro-mechanical parts with a relatively simple structure; another manufacturing method based on traditional precision machining Technology, this processing technology has a wide range of processing materials, and can process three-dimensional parts with complex structural shapes in batches

However, due to the influence of factors such as processing principles, machine tools, tools, and clamping, the processing accuracy of this method is low. At the same time, due to the extremely small feature size of the processed parts, the processing technology is very complicated and the reliability of processing is poor.

Therefore, it is difficult to apply widely

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