Multi-level membrane suction pump

Abstract

A multi-level membrane suction pump having at least two pump chambers is provided, each having a fluid inlet with at least one inlet valve and a fluid outlet with at least one outlet valve, and having a suction line connecting the fluid inlets of the pump chambers. Successive pump chambers are connected to each other via at least one connecting line such that the membrane pump upon reaching / exceeding a differential pressure in the suction line changes from a parallel operation of the pump chambers into at least also a serial operation of the pump chambers. In the inflow and outflow regions of the at least one connecting line, at least one check valve each is interposed, opening toward the subsequent pump stage. In the membrane suction pump, the check valves provided in the inflow and in the outflow regions of the connecting line(s) are designed smaller compared to the inlet and outlet valves of the pump chambers, and line sections of the connecting lines that open toward the neighboring pump chamber have a smaller clear line cross-section compared to the inlet and outlet valves, and are associated with the check valves.

Description

technical field [0001] The invention relates to a multi-stage diaphragm suction pump. Background technique [0002] When evacuating, for example, an autoclave, a high delivery power is required on the one hand, and a good final vacuum is required on the other hand. A high delivery power is achieved by the parallel connection of the individual heads, a good final vacuum is achieved by the operation of multiple stages, ie by a series connection. In many applications, especially in the laboratory range, lower final pressures are required which can only be achieved with multi-stage devices. [0003] WO 2004 / 088138 discloses a micro vacuum pump having two pump chambers delimited by a vibrating pump diaphragm each. Each of the pump chambers has a fluid inlet with an inlet valve and a fluid outlet with an outlet valve, wherein a suction conduit connected to the fluid inlet of each pump chamber and a pressure conduit connected to each fluid outlet are provided. These two pump cha...

AI Technical Summary

Problems solved by technology

[0005] However, it is disadvantageous that the non-return valves of this known diaphragm pump have dimensions comparable to the inlet and outlet valves, and the pipe sections of the connecting pipes which are arranged between the non-return valves have a correspondingly large pipe clearance. cross-section, so that a correspondingly large unfavorable space is produced in these line parts, which has a negative effect on the achievable final vacuum of known diaphragm suction pumps and negatively influences between parallel and series modes of operation. conversion point

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