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Probe for three-dimensional shape measuring apparatus and three-dimensional shape measuring apparatus

A measuring device and three-dimensional shape technology, applied in the direction of measuring device, mechanical measuring device, using mechanical device, etc., can solve the problem of reducing the measurement error of the vertical plane of the pressing force, and achieve the effect of high-precision measurement and reduction of deformation

Active Publication Date: 2010-11-17
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

so, in Figure 26 In the probe 403, in order to perform high-precision shape measurement, it is impossible to both reduce the pressing force and prevent the measurement error when measuring the vertical plane.

Method used

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  • Probe for three-dimensional shape measuring apparatus and three-dimensional shape measuring apparatus
  • Probe for three-dimensional shape measuring apparatus and three-dimensional shape measuring apparatus
  • Probe for three-dimensional shape measuring apparatus and three-dimensional shape measuring apparatus

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Embodiment Construction

[0133] Hereinafter, a probe for a three-dimensional shape measuring device (hereinafter referred to as a probe) and a three-dimensional shape measuring device (hereinafter referred to as a shape measuring device) according to embodiments of the present invention will be described in detail with reference to the drawings.

[0134] First, refer to Figure 1 to Figure 8 , indicating detector 1. figure 1 It is a perspective view showing the appearance of the probe 1 . figure 2 viewed from the vertical figure 1 diagram. image 3 yes figure 1 The perspective view when the detector 1 is cut in B-B plane. Figure 4 yes figure 1 is a perspective view of the detector 1 cut by plane A-A. Figure 5 viewed from above figure 1 diagram. Figure 6 to Figure 8 It is a diagram showing details of a part of the probe 1 .

[0135] The shape measurement device 201 includes a probe 1 having a portion in contact with the measured surfaces 61 a and 61 b ​​of the measuring object 60 to b...

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PUM

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Abstract

A probe 1 for three-dimensional shape measuring apparatus includes an attachment member 2, a swinging portion 3, a coupling mechanism 4, an arm attachment portion 120, and plate springs 9A, 9B. An arm 122 with a stylus 121 at a lower end is attached to and projected downward from the arm attachment portion 120. The arm attachment portion 120 is held to the swinging portion 3 via the plate springs9A, 9B. The swing portion 3 is coupled to the attachment member 2 inclinably in a horizontal direction by the coupling mechanism 4. A magnetic attraction force between movable and fixed-side magnets 51, 52 restores the swinging portion 3 to a neutral position where the arm vertically extends. The magnetic attraction force between the movable and fixed -side magnets 51, 52 generates a measurement force while a vertical surface is measured. The vertical deflection of the plate sprigs 9A, 9B generates a measurement force while a horizontal surface is measured.

Description

technical field [0001] The present invention relates to a probe for a three-dimensional shape measuring device that scans and measures a three-dimensional shape with high precision and low measuring force, and a three-dimensional shape measuring device including the probe. Background technique [0002] As a conventional probe for a three-dimensional shape measuring device (hereinafter, referred to as a probe) capable of measuring an outer surface, an inner surface, a pore diameter, etc. of a measurement object, there is a probe disclosed in Patent Document 1. Figure 24 and Figure 25 The configuration of the probe disclosed in Patent Document 1 is shown. [0003] Figure 24 and Figure 25 The probe 301 includes a mounting member 302 mounted on a three-dimensional shape measuring device (hereinafter referred to as a shape measuring device) 401 , a swing portion 303 , and a coupling mechanism 304 . The swing unit 303 includes an arm 322 having a contact pin 321 at a lower e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
CPCG01B5/012G01B5/016
Inventor 舟桥隆宪荒木贵久八日市屋元男
Owner PANASONIC CORP
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