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Single crystal furnace and method for inhibiting swing of flexible shaft thereof

A single crystal furnace, flexible shaft technology, applied in the direction of single crystal growth, chemical instruments and methods, crystal growth, etc., can solve the problems of reducing the adverse effect of the flexible shaft swing on the single crystal, and cannot be applied to the single crystal, so as to reduce the adverse effects, The effect of suppressing wobble

Active Publication Date: 2013-04-03
北京京仪仪器仪表研究总院有限公司
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  • Application Information

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Problems solved by technology

[0008] Moreover, the technical solutions provided by the prior art cannot directly apply force to the single crystal at the lower end of the flexible shaft, so that it is impossible to fundamentally reduce the impact of the flexible shaft swing on the formation of single crystals. Adverse effects of

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  • Single crystal furnace and method for inhibiting swing of flexible shaft thereof
  • Single crystal furnace and method for inhibiting swing of flexible shaft thereof

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Embodiment 1

[0033] The single crystal furnace provided in Embodiment 1 includes a furnace body 8 , a pulling device 1 , a flexible shaft 3 and a crucible 7 . For the convenience of description, the figure also shows part of the generated single crystals and the polycrystalline melt 71 in the crucible 7 , in order to distinguish them from the generated single crystals, in this document, part of the single crystals are called single crystals 5 . In this example, the furnace body 8 includes an auxiliary furnace 81 located at the upper part and a main furnace 82 located at the lower part. The cross-sectional area of ​​the auxiliary furnace 81 is smaller than that of the main furnace 82, and the 8 furnace body forms a bottle-shaped structure with a thinner upper part and a thicker lower part as a whole. The crucible 7 is located in the furnace cavity in the main furnace 82, and is installed on the bottom surface of the furnace cavity through the lifting seat 83. The pulling device 1 is located ...

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Abstract

The invention discloses a single crystal furnace and a method for inhibiting swing of a flexible shaft of the single crystal furnace. The single crystal furnace comprises a furnace body, a pulling device, a crucible, the flexible shaft, a controller, a position detector and at least one magnetic field generator which is positioned outside the furnace body, wherein the upper end of the flexible shaft and the crucible form a direct current conductive circuit; the input end of the controller is connected with the position detector which acquires the position information of the flexible shaft; and the output end of the controller is connected with the magnetic field generator, or / and is connected with the direct current conductive circuit. Different from a method for passively applying actingforce to the flexible shaft in the prior art, the technical scheme of the method is independent of the actual swing amplitude of the flexible shaft, can actively apply the acting force to the flexible shaft so as to better inhibit the swing of the flexible shaft; more importantly, the acting force can be directly applied to the single crystal at the lower end of the flexible shaft by the single crystal furnace, so that adverse influence generated by the swing of the flexible shaft on the single crystal can be radically reduced.

Description

technical field [0001] The invention relates to a single crystal generation technology, in particular to a single crystal furnace, and also to a method for suppressing the swing of a flexible shaft of the single crystal furnace. Background technique [0002] Single crystal furnace is the equipment for single crystal generation. The currently known single crystal furnace includes a furnace body and a flexible shaft. A crucible is arranged in the furnace body, and polycrystalline materials can be loaded into the crucible. The upper end of the flexible shaft is connected with a predetermined pulling device, and the lower end is equipped with a seed crystal. When the single crystal is formed, the crucible is heated to make the polycrystalline material in the crucible form a polycrystalline melt; the seed crystal at the lower end of the flexible shaft extends into the polycrystalline melt; the flexible shaft is pulled by the pulling device to make the flexible shaft rotate and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/20C30B15/30
Inventor 梁仁和周世增
Owner 北京京仪仪器仪表研究总院有限公司
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