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A stocker and main body technology, applied in the direction of chemical instruments and methods, semiconductor/solid-state device manufacturing, conveyor objects, etc., can solve problems such as prone to defects

Active Publication Date: 2011-03-30
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This display panel manufacturing process requires high precision and is prone to defects due to particles in the display panel

Method used

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Embodiment Construction

[0018] Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. The embodiments are described below in order to explain the present invention by referring to the figures.

[0019] And, for the exemplary embodiments of the present invention, by using the same reference numerals for the same constituent elements, a detailed description will be given for the constituent elements in the first exemplary embodiment in conjunction with the related drawings, and in other exemplary embodiments. Only constituent elements different from those related to the first exemplary embodiment are described in the embodiment.

[0020] In order to clearly describe the present invention, parts irrelevant to the description are omitted, and like reference numerals refer to like elements throughout the application document.

[0021] Also, ...

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Abstract

The present invention relates to a stocker and a dirt collecting unit of the stacker with a mechanical arm. The stocker including a main body unit having a plurality of receiving shelves, a transfer unit transferring a received material to be moved to the main body unit, a robot arm stacking the received material transferred by the transfer unit on one of the receiving shelves of the main body unit, and a dirt collecting unit moving in conjunction with the robot arm to remove particles from inside the main body unit.

Description

technical field [0001] Aspects of the invention relate to a stocker. More specifically, the present invention relates to a stocker for receiving various substrates. Background technique [0002] The stocker temporarily accommodates or stores various substrates used in the display panel manufacturing process. The display panel manufacturing process requires high precision, and defects easily occur in the display panel due to particles. Therefore, the inner space of the hopper should be kept clean. In particular, the shelves of the stocker are in direct contact with the substrates, so particles on the shelves can easily move to the substrates. [0003] As a common method for keeping the interior of the hopper clean, a person goes directly into the hopper to clean it. However, the particles are carried into the hopper with the person entering the hopper, and operation of the hopper must be suspended while the hopper is being cleaned. [0004] The above information disclose...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/04B08B17/00
CPCH01L21/67769B08B5/04B65G49/062H01L21/6734H01L21/67389
Inventor 郑基菜
Owner SAMSUNG DISPLAY CO LTD
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