Photographic device

Abstract

The present invention provides a photographic device, having a reliable shielding component with a simple structure. The photographic device comprises the shielding component for selectively shielding an opening of a housing of an objective lens, wherein the shielding component includes a shielding piece with flexibility configured to slide on a lower side edge of the housing of the objective lens in a direction vertical to an optical axis of the objective lens; a movable component configured to make the shielding piece to move between a shielding position of shielding the opening of the housing and an opening position of baring the opening; and a guiding component configured to limit a moving path of the shielding piece, wherein the guiding component includes a horizontal guiding part configured to limit a lower moving path of the housing of the objective lens in a horizontal direction, a vertical guiding part configured to limit a moving path in a vertical direction, and a bending guiding part configured to guide the shielding piece from the vertical guiding part to the horizontal guiding part.

Description

technical field [0001] The present invention relates to an imaging device for imaging a workpiece to be mounted on a processing device such as a cutting device. Background technique [0002] In the manufacture of industrial products, there are currently various processing devices, and these processing devices generally have the following structure: various precisions are continuously developed. Imaging is performed to perform precise alignment of machining positions, or to sequentially check machining results. [0003] As one example, there is a processing device that exposes an imaging device to an atmosphere containing swarf or spray such as a dicing saw (cutting device) in a semiconductor device manufacturing process or an electronic component manufacturing process. [0004] Since the dicing machine is a processing device that cuts a semiconductor wafer with a precision of micron units along the planned dividing line called a spacer to divide the wafer into individual de...

AI Technical Summary

Problems solved by technology

[0008] However, in the shielding mechanism disclosed in Patent Document 1, as the shielding sheet slides repeatedly, when the shielding sheet is at the shielding position, chips adhering to the lower surface of the shielding sheet accumulate between the shielding sheet and the guide groove, so that the shielding sheet The frictional resistance increases gradually

Finally, at the portion where the shielding sheet slides at right angles from the horizontal direction to the vertical direction, there is a problem that the shielding sheet is bent and has to be replaced.

[0009] In addition, when the operator replaces parts, since the guide groove for inserting the shielding piece is not arranged to face the operator, there is also a problem that it is difficult to insert the shielding piece into the guide groove.

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