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Method and device for measuring position and line width of laser beam by using line array CCD (Charge Coupled Device)

A detection device and detection method technology, applied in the direction of measurement devices, optical devices, instruments, etc., can solve the problems of complex development and application, low measurement accuracy, unfavorable promotion and application of manual readings, etc.

Inactive Publication Date: 2011-05-18
XIAN HUANIC OPTOELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The former is complicated to develop and apply, and its measurement accuracy is low, so it can only be used as a static test; the latter has low measurement accuracy, and manual readings are not conducive to popularization and application

Method used

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  • Method and device for measuring position and line width of laser beam by using line array CCD (Charge Coupled Device)
  • Method and device for measuring position and line width of laser beam by using line array CCD (Charge Coupled Device)

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Embodiment Construction

[0025] The purpose of the present invention is to provide a method for determining the absolute position of the laser beam on the photosensitive surface of the CCD by using a linear CCD to judge the line width and position of the laser beam on the photosensitive surface of the CCD. Using a linear array CCD device, drive the linear array CCD through a programmable digital logic device or other electronic devices to obtain the Gaussian curve of the incident laser beam. The specific method is as follows:

[0026] 1) Obtain the Gaussian curve of the incident laser beam;

[0027] 1.1) The laser beam is incident on the photosensitive surface of the linear array CCD;

[0028] 1.2) Obtain the Gaussian curve of each pixel point of the incident laser beam on the photosensitive surface of the CCD.

[0029] 2) Detect the position and line width of the laser beam according to the Gaussian curve.

[0030] 2.1) Use the two edges of the envelope formed by the Gaussian curve of each pixel po...

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Abstract

The invention relates to a method and device for measuring position and line width of a laser beam by using a line array CCD (Charge Coupled Device). The method comprises the following steps of: 1, obtaining a Gaussian curve of an incident laser line beam; and 2, detecting the position and the line width of the laser beam according to the Gaussian curve. The method and the device can be used for detecting the absolute and the relative positions of the laser line beam and detecting the line width of the line beam, and can be converted into a mode of measuring displacement, length, angle displacement and the like; and by using the method, the deformation and the amplitude of a platform are detected, the line linearity of the straight line laser is measured, and a laser instrument is comprehensively detected.

Description

technical field [0001] The invention relates to a detection method and a device for the position and line width of a laser beam, in particular to a detection method and a device for measuring the position and line width of a laser beam with a linear array CCD. Background technique [0002] At present, the position measurement of the laser beam mainly uses the area array CCD as the signal acquisition element, and the laser beam is imaged by the area array CCD. Through image acquisition and digital image processing, the projection position information of the laser beam on the CCD is extracted, so as to obtain The position and linewidth of the laser beam. Or through the developed area array CCD pair, such as a monitor, etc., the laser line beam is measured by human eye observation after taking a camera. The former is complicated to develop and apply, and has low measurement accuracy, so it can only be used as a static detection; the latter has low measurement accuracy, and man...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/02G01B11/27
Inventor 孙建华袁科何先灯
Owner XIAN HUANIC OPTOELECTRONICS CORP