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Device and method for measuring and correcting energy sensor

A technology of energy sensor and sensor to be measured, applied in the field of photolithography, can solve the problems of inaccurate measurement results, etc., and achieve the effects of improving accuracy, simple measurement and saving energy

Active Publication Date: 2013-07-17
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the transition state of the transmittance is mixed, the measurement result of the energy sensor is mixed with the influence of the illumination system and the objective lens, resulting in inaccurate measurement results. Therefore, it is necessary to separately measure the transition state before the ED and ESS are integrated into the lithography machine.

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  • Device and method for measuring and correcting energy sensor
  • Device and method for measuring and correcting energy sensor
  • Device and method for measuring and correcting energy sensor

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Embodiment Construction

[0023] In the following, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. For the convenience of describing and highlighting the present invention, relevant components existing in the prior art are omitted from the drawings, and the description of these known components will be omitted.

[0024] like figure 1 As shown, the energy sensor calibration device includes a light source 1 , a beam splitter 2 , a reference light shutter 3 , a reference sensor 4 , a measuring light shutter 5 , and a sensor 6 to be tested. The incident light emitted by the light source 1 is divided into a reference light 7 and a measuring light 8 by a beam splitter 2 . The reference light 7 is incident on the reference sensor 4 via the reference shutter 3 . The measuring light 8 is incident on the sensor 6 to be tested through the measuring shutter 5 .

[0025] In this embodiment, the light source adopts a laser, the freq...

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Abstract

The invention discloses a device for measuring and correcting an optical energy sensor. The device comprises a light source, a spectroscope, a measurement light shutter, a reference light shutter, a reference sensor and a sensor to be measured, wherein incident light emitted by the light source is divided into reference light rays and measurement light rays by using the spectroscope; the reference light rays enter the reference sensor through the reference light shutter; and the measurement light rays enter the sensor to be measured through the measurement light shutter. The transition status characteristics of the energy sensor are measured and a transition status characteristic curve is obtained by fitting, so that the transition status error of the energy sensor can be corrected and the measuring accuracy of the energy sensor is enhanced.

Description

technical field [0001] The invention belongs to the field of photolithography, and relates to an optical energy sensor measuring and calibrating device and method. Background technique [0002] In the lithography system, the energy sensor is a sensor used to measure the energy of the exposure beam in the optical system. Generally speaking, there are two beam energy sensors in the lighting system, one is inside the lighting system, called ED, which is used in the exposure The beam energy is dynamically monitored, and the dose control of many lithography machines is based on the measured value of the ED sensor for feedback control. The other one is on the workpiece stage, called ESS, which is used to measure the field profile and dose during non-exposure. [0003] The working principle of ESS and ED in the lithography machine is similar. They both use special crystals (such as YAG: CE crystals) to convert ultraviolet light into green light, and then convert the optical signal...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J1/16G03F7/20
Inventor 张俊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD