Water spray humidification control method for clean room and humidification control system

Abstract

The invention relates to a water spray humidification control method for clean room and a humidification control system, relating to a water spray humidification control method for clean room and a humidification control system, in which a nozzle which can refine spray water particles is directly arranged inside the clean room, a humidity sensor used for monitoring / controlling the humidity change of the clean room is arranged in the clean room, and a control part which can control above subassemblies is constructed, to keep the humidity inside the clean room according to the target humidity. The humidity of the clean room is measured, when the humidity inside the clean room drops and humidification is needed, the humidification nozzle is utilized to directly and finely spray the volume to be humidified to the clean room, so as to directly control the humidity inside the clean room, when compared with the existing steam humidification way, the humidity inside the clean room can be controlled stably; besides the humidification effect by spraying water, cooling effect also can be obtained, therefore the energy cost for operating the boiler for humidification is saved, and the loads of the refrigerator are reduced.

Description

technical field [0001] The invention relates to a water spray humidification control method and a humidification control system in a clean room, more specifically, a nozzle capable of finely spraying water particles is directly arranged inside the clean room, and a detection humidity sensor for monitoring / controlling the humidity change of the clean room is used. The sensor is arranged in the clean room and constitutes a control unit capable of controlling the above-mentioned components, and is used for a clean room water spray humidification control method and a humidification control system for maintaining the humidity inside the clean room according to the target humidity. Background technique [0002] First of all, a clean room refers to making the floating particles in the air in a certain space have a specified particle size and a cleanliness below a specified value, and maintaining the specified cleanliness of materials, medicines, gases, water, etc. that are supplied ...

AI Technical Summary

Problems solved by technology

[0010] The above-mentioned steam humidification method has the problem that a large amount of cost is required to generate steam

[0011] In addition, due to the centralized control method inside the air conditioner 30, it is not conducive to maintaining uniform humidity distribution in different areas inside the clean room, and the humidity in different areas inside the clean room cannot be uniformly controlled.

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