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Manufacturing method of piezoelectric actuator

A technology for piezoelectric actuators, manufacturing methods, application in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, material selection for piezoelectric devices or electrostrictive devices, etc. direction, which can solve problems such as poor driving of piezoelectric actuators and inability to maintain insulation

Inactive Publication Date: 2011-11-09
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the insulation between the lead-out electrodes cannot be maintained, and the drive of the piezoelectric actuator is defective due to a short circuit.

Method used

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  • Manufacturing method of piezoelectric actuator
  • Manufacturing method of piezoelectric actuator
  • Manufacturing method of piezoelectric actuator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0035] Embodiments will be described in detail below with reference to the drawings.

[0036] figure 1 It is a schematic diagram showing an example of an ink jet recording device 1000 as a liquid ejecting device, which includes an ink jet recording head 1 as a liquid ejecting head, and the recording head 1 includes a piezoelectric actuator.

[0037] Such as figure 1 As shown, an ink jet recording apparatus 1000 includes recording head units 1A and 1B.

[0038] In the recording head units 1A and 1B, cartridges 2A and 2B constituting an ink supply mechanism are detachably provided. A carriage 3 on which the recording head units 1A and 1B are mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be able to move in the axial direction.

[0039] The recording head units 1A and 1B eject, for example, a black ink composition and a color ink composition, respectively. The driving force of the drive motor 6 is transmitted to the carriage 3 throu...

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PUM

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Abstract

The invention provides a manufacturing method of a piezoelectric actuator. After the piezoelectric element forming process (S5), in the etching process (S6), etching is performed on a portion of at least the vibrating plate (53) between the lead-out electrodes (90) formed afterwards in the lead-out electrode forming process (S7) in a condition where the upper electrode film (83) etching residual is removed and the vibrating plate (53) is not removed. In the piezoelectric element forming process (S5), even if the upper electrode film (83) etching residual is generated between the lead-out electrodes (53), the upper electrode film (83) etching residual is divided up due to the etching and it is possible to maintain insulation between the lead-out electrodes (90) formed in the upper electrode film (83) etching residual. Accordingly, it is possible to obtain the manufacturing method of the piezoelectric actuator (100) which reduces driving defects in the piezoelectric actuator (100) generated by short circuiting between the lead-out electrodes (90).

Description

technical field [0001] The present invention relates to a method of manufacturing a piezoelectric actuator including a piezoelectric element having individual electrodes and a piezoelectric body made of a piezoelectric material, and extraction electrodes connected to the individual electrodes. Background technique [0002] As a piezoelectric actuator, there is known a piezoelectric actuator that includes a piezoelectric element having a lower electrode, a piezoelectric body, and an upper electrode, and an extraction electrode that is connected to an electrode of the piezoelectric element, respectively. connect. As a piezoelectric element, there is a structure in which a piezoelectric body made of a piezoelectric material having an electrical / mechanical conversion function, such as crystallized piezoelectric ceramics, is sandwiched between two electrodes, an upper electrode and a lower electrode. [0003] As a method of manufacturing piezoelectric actuators, the following ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/22B41J2/01H01L41/08B41J2/045B41J2/055B41J2/135B41J2/14B41J2/145B41J2/16B81C1/00H01L41/09H01L41/18H01L41/29H01L41/332H01L41/39
CPCB41J2/161H01L41/0973B41J2/1623H01L41/332H01L41/1876H01L41/39B41J2/1629B41J2/1631B41J2/1628H01L41/047B41J2/1632B41J2/1646B41J2/1635B41J2002/14241H01L27/20H01L41/318B41J2002/14419Y10T29/42H10N30/875H10N30/2047H10N30/8554H10N30/078H10N30/082H10N39/00
Inventor 神户雅人山冈卓实
Owner SEIKO EPSON CORP
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