A kind of saline solution etching method of suede ZNO base film

Abstract

The invention discloses a saline solution corrosion method for a flocked ZnO-base thin film. A flocked structure is formed by corroding an intrinsic or doped ZnO, ZnMgO, ZnCdO, ZnBeO or ZnCaO thin film by adopting ammonium sulphate, ammonium nitrate or ammonium phosphate solution. The saline solution corrosion method has proper corrosion speed and is easy to operate; the texture process can be controlled well; and the prepared flocked ZnO-base thin film has high optical and electric characteristics and a remarkable light trapping effect.

Description

technical field [0001] The invention relates to an etching method for a textured ZnO-based thin film, in particular to a salt solution etching method for a textured ZnO-based thin film. Background technique [0002] The suede surface is a state of the surface topography of the film, and it is a specific manifestation of the light-trapping structure of the film. It is characterized by a relatively large surface roughness. Angle, thereby increasing the optical path of incident light in the material and increasing the absorption of light. For example, in thin-film solar cells, the transparent electrode plays a very important role in improving the conversion efficiency of the cell. Fabricating a textured transparent conductive film on a glass substrate that satisfies the light scattering characteristics can increase the short-circuit current of the cell and the incident light in the solar cell. The optical path in the battery, thereby improving the photoelectric conversion effi...

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Problems solved by technology

At present, there are also reports on the use of ammonium acetate and ammonium chloride solutions to form suede ZnO-based films, but there are no reports on other salt solutions as etching solutions.

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