The utility model discloses a kind of
pollutant cleaning element and
pollutant cleaning element preparation device, applied to
wafer cleaning field, the
pollutant cleaning element includes the cleaning surface for being contacted with
target action object;The cleaning surface of pollutant cleaning element is formed with micro-nano structure;The cleaning surface of pollutant cleaning element formed with micro-nano structure has super hydrophobicity.The utility model is contacted with the cleaning surface of
target action object by pollutant cleaning element, it is set to be formed with micro-nano structure, on the one hand, the specific surface area of cleaning surface is strengthened, the capacity of pollutant cleaning element adsorption and capture pollutant is improved, make cleaning effect more excellent, on the other hand, the micro-nano structure that this pollutant cleaning element possesses has super
hydrophobic effect, so that
liquid drop can take away pollutant when rolling on surface, improve the self-cleaning of this pollutant cleaning element, to improve the recycling of this pollutant cleaning element.