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Pumping hole of crystal pulling furnace lower furnace chamber

A technology of air extraction port and crystal pulling furnace, which is applied in the field of air extraction port, which can solve the problems of dead angle of the air extraction port and inability to clean it, and achieve the effect of convenient cleaning, cleaning speed and improved cleaning degree

Inactive Publication Date: 2012-01-04
江苏新华机电设备制造有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since a lot of powder waste will be generated during the crystal pulling process, when cleaning up such powder waste, the original air extraction port (right-angle elbow) has a dead angle and cannot be cleaned.

Method used

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  • Pumping hole of crystal pulling furnace lower furnace chamber
  • Pumping hole of crystal pulling furnace lower furnace chamber

Examples

Experimental program
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Effect test

Embodiment Construction

[0007] The present invention will be further described below with reference to the accompanying drawings.

[0008] like figure 1 As shown, the gas extraction port of the lower furnace chamber of the crystal pulling furnace is connected with a tee 1 on the inner shell 3 of the lower furnace chamber. A port 12 of the tee is used to communicate with the exhaust pipe, and a port 11 of the tee is in sealing connection with the detachable sealing cover 2 .

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Abstract

The invention provides a pumping hole which can be used for cleaning powdery garbage in a pumping hole at the junction of a pumping pipe and a lower furnace chamber. The shell of the lower furnace chamber is communicated with a tee joint; and one end of the tee joint is communicated with the pumping pipe, and another end of the tee joint is connected with a detachable sealing cover in a sealing manner.

Description

technical field [0001] The invention relates to a gas extraction port of a lower chamber of a crystal pulling furnace. Background technique [0002] In the lower furnace chamber of the existing crystal pulling furnace, the exhaust pipe communicates with the shell of the lower furnace chamber through a right-angle elbow. Since a lot of powder waste will be generated during the crystal pulling process, when cleaning up such powder waste, the original air extraction port (right-angle elbow) has a dead angle and cannot be cleaned. Contents of the invention [0003] The purpose of the present invention is to provide an air extraction port capable of cleaning up the powder waste in the air extraction port where the air extraction pipe is connected to the lower furnace chamber. [0004] The air extraction port of the lower furnace chamber of the crystal pulling furnace is connected with a tee on the shell of the lower furnace chamber; one port of the tee is used to communicate w...

Claims

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Application Information

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IPC IPC(8): C30B15/00
Inventor 丁俊李新马金忠马一超
Owner 江苏新华机电设备制造有限公司
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