Random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device
A piezoelectric vibrator and megasonic wave technology, which is applied in the field of random phase shift mixing piezoelectric vibrator combined megasonic wave transducer devices, can solve the problems of low sound field intensity, reduced vibrator amplitude, and reduced cleaning effect, and achieves improved accuracy. , the effect of reducing frequency transition time and phase noise
Active Publication Date: 2012-04-04
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
However, due to the interference phenomenon of the megasonic sound field, many hot spots with high sound field intensity will be formed on the wafer, and many dead spots with low sound field intensity will be formed at the same time, and the uniformity of the sound field intensity on the wafer is difficult to achieve.
Although in the process of improvement, there is a method of using frequency scanning to reduce the formation of hot spots, but since the frequency scanning only surrounds one center frequency, and this scanning around the center frequency is only applied to one megasonic vibrator, the megasonic vibrator The natural frequency of the mechanical vibration is fixed (generally equal to the center frequency of the megasonic wave), and the change of the deviation from the center frequency will cause the amplitude of the vibrator to decrease and the energy of the transmitted megasonic wave to decrease, so that the acoustic energy density formed on the surface of the wafer increases with the scanning Frequency changes, unable to produce a uniform sound field
There is also a method of frequency superposition combination, but because the voltage of frequency superposition combination is still applied to the same piezoelectric crystal oscillator, the vibration of the oscillator changes too much, which affects the efficiency of electro-acoustic conversion, which reduces the cleaning effect
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[0032] A random phase-shift mixing type piezoelectric vibrator combined megasonic transducer device proposed by the present invention will be described in detail below with reference to the drawings and embodiments.
[0033] The present invention adopts two or more driving signals, the signal frequency is in the range of 700KHz to 2MHz, and the phase offset of at least one driving signal can be randomly set within a certain range with time, respectively loaded into a megasonic converter energy device assembly. The driving signals with fixed phase shift and relatively random phase shift change act on different combinations of piezoelectric crystal arrays, and the excited megasonic synthesis waveform generates a randomly changing sound field in the corrosive cleaning medium, which will not form the existing megasonic wave The hot spots and dead spots generated by the coherence of the fixed megasonic synthetic sound field excited by the transducer, thereby generating the uniform ...
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The invention relates to the technical field of mega soundwave transducers, and discloses a random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device, wherein a microprocessor of an alternating current voltage drive signal generation and amplification circuit is used for outputting the frequency control words and the phase-shifting control words of multichannel alternating current voltage drive signal to a multichannel alternating current voltage drive signal generation circuit, and at least one path of phase-shifting control word randomly varies along with time within a certain range; the multichannel alternating current voltage drive signal generation circuit generates the multichannel alternating current voltage drive signal according to the frequency control words and the phase-shifting control words; a power amplification and impedance matching circuit is used for amplifying the generated alternating current voltage drive signal through a power amplification circuit into the drive signal, and outputting the drive signal to a mega soundwave transducer assembly body through an impedance matching circuit; and the mega soundwave transducer assembly body loads the generated drive signal to produce a random variation sound field. Through the random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device, a uniformity sound field which is required by surface wet etching cleaning can be generated.
Description
technical field [0001] The invention relates to a megasonic transducer, in particular to a random phase-shift frequency-mixing type piezoelectric vibrator combination megasonic transducer device. Background technique [0002] As the feature size of integrated circuits enters the deep submicron stage, the control requirements for wet etching and cleaning in the manufacturing process of integrated circuit chips are getting higher and higher, the precision of etching is getting higher and higher, and the particles to be cleaned are getting higher and higher. Small, the uniformity of corrosion and cleaning becomes a challenging issue. [0003] The chemical corrosion and cleaning under the action of megasonic waves can help to accelerate the effect of corrosion and cleaning, and greatly improve the removal of pollution particles. However, due to the interference phenomenon of the megasonic sound field, many hot spots with high sound field intensity and many dead spots with low s...
Claims
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Inventor吴仪马嘉
OwnerBEIJING NAURA MICROELECTRONICS EQUIP CO LTD