Safe opening and closing device of door
A technology of safety switch and door lock, which is applied in the direction of non-mechanical transmission-operated locks, building locks, buildings, etc., can solve problems such as the inability to guarantee the absolute safety of door switches, dangers to personal life, and adverse effects on product process quality to achieve guaranteed Process quality and personal safety, the effect of avoiding economic losses
Active Publication Date: 2013-11-13
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
With this method, the door switch cannot be guaranteed to be absolutely safe. For example, if the processing process is in progress in the microenvironment of the semiconductor process equipment, the entire process will be interrupted after the door is opened, which will adversely affect the product process quality and cause personal life danger.
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[0022] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0023] Such as Figure 1 to Figure 3 As shown, the safety switch device of the present invention can be applied to the door of any suitable processing equipment chamber. In this embodiment, the semiconductor processing equipment has a microenvironment chamber for semiconductor processing as an example to illustrate the present invention in detail. Described micro-environment chamber wall is provided with door opening, and this door opening is provided with the micro-environment door 3 that isolates micro-environment chamber and external environment, and the door limit of micro-environment door 3 is set toward the side of chamber wall 4 that cooperates with the door. There is a seal 10 . The door safety switch device of this embodiment includes a door lock main body 2 fixed on the micro-environment door 3, and a movable lock fixed on the micro-environ...
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The invention discloses a safe opening and closing device of a door, comprising a door lock main body and a locking block and also comprising a locking unit, a driving unit and a control module, wherein the door lock main body is fixedly arranged on the door; the locking block is fixedly arranged on a cavity wall matched with the door and is matched with a movable locking part of the door lock main body; the locking unit is provided with a movable part; the driving unit drives the movable part of the locking unit to move; the control module sends a control instrument to the driving unit; and the movable part has a locking working position for limiting the movement of the movable locking part on a moving path. Due to the adoption of the safe opening and closing device, the phenomena such as personal safety problem caused when the door of processing equipment is opened carelessly in the working process, and large economic loss caused by reduction of the process quality of a product can be avoided.
Description
technical field [0001] The invention relates to the technical field of door safety switches, in particular to a door safety switch device. Background technique [0002] In the process of semiconductor processing in semiconductor process equipment, there are special requirements for the microenvironment in which the production is located, such as the need for a microenvironment with high cleanliness and low oxygen content to ensure the quality of the produced silicon wafers and personal safety. Therefore, it is very necessary to control the opening and closing of the door located on the semiconductor process equipment and used to isolate the microenvironment from the external environment. [0003] In this field, the opening and closing control of the traditional micro-environment door is mostly only installed with a door lock, and the door lock can be opened manually on the outside of the door. With this method, the door switch cannot be guaranteed to be absolutely safe. Fo...
Claims
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IPC IPC(8): E05B47/00E05B51/02E05B65/48E05B15/12
Inventor 王丽荣董金卫白鹏
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD