SECS communication device and SECS communication method thereof
A technology of equipment communication and exchange device, applied in the field of message exchange device and message exchange, can solve problems such as time-consuming, money and labor costs, errors, lack of availability, etc., and achieve intuitive and simple setting and operation methods and industrial benefits. Large and stable effect
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[0046]The detailed features and advantages of the present application are described in detail below in the embodiments, the content of which is sufficient for those skilled in the art to understand the technical content of the present application and implement it accordingly, and according to the content disclosed in this specification, claims and drawings, Objects and advantages related to the present application can be easily understood by those skilled in the art.
[0047] figure 1 It is a system application architecture diagram of a message exchange device of SEMI Equipment Communication Standards (SECS) according to an embodiment of the present application. The message exchanging device 100 proposed in this application is applicable to an Equipment Automatic Program (EAP) 200 and an information storage device 300 for exchanging SECS-II messages, where SECS-II is defined as semiconductor equipment communication standard messages.
[0048] The information storage device 30...
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