Magnetoresistive angle sensors

Abstract

The present invention concerns magnetoresistive angle sensors. Magnetoresistive angle sensors, sensor systems and methods are disclosed. In an embodiment, a magnetoresistive angle sensor includes a first plurality of conductors arranged in parallel with one another in a first plane to form a first array; a second plurality of conductors arranged in parallel with one another in a second plane to form a second array, the second plane being different from and spaced apart from the first plane, and the second plurality of conductors being orthogonally arranged with respect to the first plurality of conductors; and at least one magnetoresistive element disposed between the first plane and the second plane.

Description

technical field [0001] The present invention relates generally to integrated circuits, and more particularly to integrated circuit magnetoresistive angle sensors. Background technique [0002] A magnetoresistive (MR) angle sensor is typically a thin planar structure formed on a major surface of a substrate such as a semiconductor die. The projection of the magnetic field onto this main surface is called the in-plane magnetic field. MR sensors directly measure the angle between the in-plane magnetic field and a reference direction in the main surface. However, MR sensors generally do not measure the magnitude of the magnetic field. In many applications, this is a defect. For example, MR angle sensors typically include a small permanent magnet attached to a shaft and whose position is to be measured. However, the magnet can become unattached, chipped or broken, or can attract live metal that shorts out part of the magnetic field. These and other situations can provide ang...

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Problems solved by technology

This is another drawback associated with traditional MR sensors

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