Multi-degree-of-freedom on-line detection device for optical element damage
A technology of optical components and detection devices, which is applied in the direction of optical testing flaws/defects, etc., can solve problems such as damage to multi-degree-of-freedom optical components, and achieve the effect of long working distance
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specific Embodiment approach 1
[0018] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the multi-degree-of-freedom optical element damage online detection device described in this embodiment includes an optical imaging platform 1, a pitch angle adjustment mechanism 2, a turning mechanism 3, a circling mechanism 4, a reduction box 5 and a six-degree-of-freedom manipulator 6,
[0019] The optical axis of the optical imaging platform 1, the center axis of the pitch angle adjustment, the center axis of the circling mechanism and the rotation center axis of the turning mechanism intersect in space at a center point o, and the center point o coincides with the ball center of the measured target chamber;
[0020] The optical imaging platform 1, the pitch angle adjustment mechanism 2, and the circling mechanism 4 are arranged on the detection device bracket,
[0021] The pitch angle adjustment mechanism 2 is used to drive the optical imaging platform 1 to rotate around...
specific Embodiment approach 2
[0028] Embodiment 2: This embodiment further describes Embodiment 1. The multi-degree-of-freedom optical element damage on-line detection device scans the optical elements in the measured target room in the latitude direction within ±55 degrees.
specific Embodiment approach 3
[0029] Embodiment 3: In this embodiment, Embodiment 1 is further explained. The multi-degree-of-freedom optical element damage on-line detection device scans the optical elements in the measured target chamber in the longitude direction within ±180 degrees.
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