Method for manufacturing yttrium barium copper oxide target

A technology of yttrium barium copper oxide and target materials, which is applied in the field of manufacturing high-temperature superconducting thin films, can solve the problems of complex process and poor density of targets, and achieve superconducting performance, small grain size and high density Effect

Inactive Publication Date: 2012-07-18
苏州晶纯新材料有限公司
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  • Abstract
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Problems solved by technology

The characteristic of this method is that it can obtain YBCO target material with superconducting phase structure, but the density of the prepared target material is poor, and the process is relatively complicated.

Method used

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  • Method for manufacturing yttrium barium copper oxide target

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Embodiment Construction

[0025] The present invention will be further described in detail below in conjunction with specific embodiments, but the present invention is not limited to the following embodiments.

[0026] A preparation method of yttrium-barium-copper-oxygen target material includes the following steps in sequence:

[0027] (1) Put Y 2 O 3 , BaO, CuO are mixed uniformly according to the atomic ratio Y:Ba:Cu=1:2:3 to obtain a mixed powder, Y 2 O 3 , The primary particle size of BaO and CuO is 100~200nm, and the purity is greater than 99.9wt%;

[0028] (2) The mixed powder is formed by cold pressing with a four-column hydraulic press, and the cold pressing pressure is 250MPa;

[0029] (3) Put the cold-pressed mixture into an oxygen atmospheric sintering furnace and sinter at 900°C. The sintering time is 12 hours. After the sintering is completed, it is cooled to room temperature and taken out and crushed into -300 meshes to obtain barium yttrium. Copper oxygen superconducting phase po...

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Abstract

The invention relates to a method for manufacturing a yttrium barium copper oxide target, which comprises the following steps of: (1) uniformly mixing Y2O3, BaO and CuO according to a certain ratio (the atomic ratio of Y:Ba:Cu=1:2:3) to obtain mixed powder, wherein the primary particle size of Y2O3, BaO and CuO is 100-300 nm, and the purity is greater than 99.9 wt%; (2) performing cold pressing on the mixed powder with a four-column hydraulic press, wherein the cold pressing pressure is 200-300 MPa; (3) placing the mixture in an oxygen normal-pressure sintering furnace, sintering the mixture at 800-950 DEG C, cooling the mixture after sintering is completed, taking out the mixture at normal pressure, and crushing the mixture into powder with 30-500 meshes; (4) performing cold pressing on the powder with the four-column hydraulic press to form a blank, wherein the cold pressing pressure is 30-50 MPa; (5) performing cold isostatic pressing on the blank, wherein the pressure is 200-300 MPa; and (6) sintering the blank in a furnace. The yttrium barium copper oxide target manufactured by the method has small grain size and high density.

Description

technical field [0001] The invention relates to a method for manufacturing a yttrium-barium-copper-oxygen target material, which is especially used in the manufacture of high-temperature superconducting thin films. Background technique [0002] With the rapid development of high-temperature superconducting thin-film electronic devices, the quality requirements for superconducting thin-film materials are getting higher and higher. The best developed and successfully applied at home and abroad are yttrium-based and thallium-based epitaxial thin films. The application of thallium-based materials is limited due to the coexistence of multiple phases and the toxicity and volatility of thallium elements. YBCO thin film develops rapidly because of its smooth surface, good orientation arrangement, complete structure, and easy to obtain high Jc. [0003] In the application of YBCO film, in order to get good performance, the film must have the correct composition, crystal structure an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/45C04B35/622
Inventor 钟小亮王广欣王树森
Owner 苏州晶纯新材料有限公司
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