3D measuring device

A technology for three-dimensional measurement and measurement of objects, which is applied to measurement devices, optical devices, and image data processing. It can solve problems such as difficulty in detecting measurement objects, and achieve the effect of solving halo or shadow problems.
CN102628677BActive Publication Date: 2016-12-14JUKI AUTOMATION SYST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JUKI AUTOMATION SYST
Publication Date
2016-12-14

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Abstract

The invention provides a three-dimensional measurement device, comprising: a projection unit, which projects stripes to a projectable area, which is the peripheral area of ​​the intersection point on the measurement object when a perpendicular line is drawn to the measurement object; a photographing unit, which can A plurality of photographing areas in the projection area in which the measurement object projected with the stripes is photographed; and a control unit that executes a process of three-dimensional measurement of the measurement object based on the image photographed by the photographing unit.
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Description

technical field

[0001] The present invention relates to a three-dimensional measurement device capable of three-dimensional measurement of a measurement object using a phase shift method or the like. Background technique

[0002] Hitherto, as a method of inspecting the quality of a measurement object such as a printed substrate, a method of analyzing an image obtained by photographing the measurement object and inspecting the quality of the measurement object has been used. In two-dimensional image analysis, it is difficult to detect defects (for example, cracks and voids) in the height direction of the measurement object. For this reason, a method of measuring the three-dimensional shape of a measurement object by three-dimensional image analysis and detecting the quality of the measurement object has recently been adopted.

[0003] As a method of measuring the three-dimensional shape of a measurement object by image analysis, a phase shift method (time fringe analysis met...

Claims

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