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Electronic-paper active substrate and manufacturing method thereof and electronic-paper display screen
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A manufacturing method and technology of electronic paper, applied in printed circuit manufacturing, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as limited effect, breakdown, gate edge and source-drain short circuit, etc., to achieve area increase, The effect of increasing the storage capacitor and expanding the limit of the storage capacitor
Active Publication Date: 2014-07-02
BOE TECH GRP CO LTD
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Therefore, in order to achieve a large capacitance of the active substrate, one method is to increase the area where the source and drain electrodes face the common electrode, but the pixel area itself is limited, so the effect of this method is limited; another method is to reduce the gate insulating layer The thickness of the gate insulating layer is too thin, which may cause a short circuit or breakdown between the gate edge and the source and drain, and will affect the performance of TFT (thin film field effect transistor)
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no. 1 example
[0056] Next will refer to Figure 2 to Figure 10 The specific implementation manner of the manufacturing method of the electronic paper active substrate of the first embodiment will be described.
[0057] Figure 12 It is a flow chart of the manufacturing method of the electronic paper active substrate according to the first embodiment of the present invention.
[0058] Such as Figure 12 As shown, the manufacturing method of the electronic paper active substrate of this embodiment includes the following steps:
[0059] The gate and first common electrode forming step S1 is used to form the gate (specifically, for example, a metal layer) and the first common electrode on the substrate by, for example, a photolithography process, figure 2 It shows a schematic cross-sectional view of the gate and the first common electrode in the active substrate. It can be seen from the figure that the first common electrode almost occupies most of the area of the pixel unit, and the area...
no. 2 example
[0072] The difference between this embodiment and the first embodiment is that, in the first via hole forming step S9, the method for manufacturing the electronic paper active substrate described in the first embodiment needs to etch the resin passivation layer and the passivation layer to form The first via hole; in this embodiment, the process of the first via hole forming step S9 is simplified, that is, by adding a passivation layer in the passivation layer after the passivation layer forming step S5 or the second via hole forming step S6 Forming the first via hole The first forming step (for example, by etching) is to facilitate obtaining the structure formed with the second via hole and the lower part of the first via hole.
[0073] The most cost-effective process is that the second via hole formation step and the first via hole first formation step can be completed in the same etching step, that is, the formation of both is completed at one time using one mask, such as ...
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Abstract
The invention discloses an electronic paper active substrate, a manufacturing method thereof, and an electronic paper display screen. The electronic paper active substrate of the present invention includes: a substrate, a gate, a first common electrode, a gate insulating layer, an active layer, a source drain, a passivation layer, a resin passivation layer, and a pixel electrode layer; the gate electrode and the first common electrode are arranged on the substrate, and the gate insulating layer, active layer, source and drain electrodes, passivation layer, resin passivation layer and pixel electrode are arranged in sequence on the gate layer; wherein, the electronic paper active substrate also includes a second common electrode, and the first common electrode is sequentially arranged with a gate insulating layer, a source drain, a passivation layer, a second common electrode, and a resin passivation layer , and a pixel electrode layer, and the first common electrode is electrically connected to the second common electrode.
Description
technical field [0001] The present invention relates to an electronic paper active substrate, a manufacturing method thereof, and an electronic paper display screen, in particular to an electronic paper active substrate using active matrix electrophoretic display technology, the manufacturing method of the active substrate and the use of the electronic paper Active substrates for e-paper displays. Background technique [0002] Electronic paper is a kind of thin and soft paper, and it is a new type of reusable electronic display device. Electrophoretic electronic paper is one of them. It uses charged particles containing black particles and white particles to Image display is achieved by moving up and down in an applied electric field. In electronic paper, in order to realize the display of text information, it is necessary to use an active matrix driving technology, for example, thin film transistor (Thin Fillm Transistor, referred to as TFT) technology is a kind of realizi...
Claims
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