Foreign matter grinding method and foreign matter grinding device on workpiece surface

Abstract

A defect on the surface of a workpiece is captured, and information for correction is prepared. On the basis of this information, the height of a foreign object requiring correction is measured. If this measured height is less than the first standard value, shift is made to a usual abrasion process. If the measured height is not less than the first standard value and is less than the second standard value, shift is made to a temporary abrasion process. If the measured height is not less than the second standard value, it is determined that no abrasion should be performed. In the aforementioned temporary abrasion process, an abrasion head is lowered only by a predetermined amount. Subsequently, an abrasion tape is paid out from a supply reel, and the foreign object is ground in such a way that while rewinding the abrasion tape with a rewinding reel, the abrasion head is used to press the abrasion tape between the supply reel and the rewinding reel. Thereafter, it is checked whether a change occurred in the height of the foreign object. In a case where a change occurred in the height, shift is made to a usual abrasion process. In a case where no change occurred in the height, no abrasion is performed. Due to the above, even if a large and high-hardness foreign object sticks to the surface of the workpiece, it is possible to minimize reduction in processing capability and to prevent breakage of the abrasion tape and occurrence of dragging damage to the workpiece.

Description

technical field [0001] The present invention relates to a foreign matter grinding method and device for grinding and correcting foreign matter on the surface of a workpiece. Background technique [0002] In conventionally widely used color liquid crystal display devices, liquid crystals are sealed between two glass substrates, a color filter substrate and an array substrate. A transparent electrode film is formed on the color filter element of the color filter substrate. When manufacturing a color filter substrate, for example, various fibers generated from clothing, etc., skin tissue of an operator, etc. adhere to the surface of the substrate. Foreign objects such as metal flakes and glass flakes will form protrusion-shaped defects. When this protrusion-shaped defect occurs, the defect will come into contact with the counter electrode, and a defect will occur in which no image is formed in this portion. Therefore, as shown in Patent Document 1, for example, in the color f...

AI Technical Summary

Problems solved by technology

When this protrusion-shaped defect occurs, the defect contacts the opposite electrode, and a defect in which an image is not formed occurs in this portion

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