Silicon-based dynamically tuned gyroscope rotor block structure with three balance rings and machining method of silicon-based dynamically tuned gyroscope rotor block structure

Abstract

The invention discloses a silicon-based dynamically tuned gyroscope rotor block structure with three balance rings, which comprises an inner ring, a rotor and three independent balance rings, wherein the inner ring, the rotor and the three balance rings are of hollow cylinder structures, the inner ring is fixedly connected with a motor rotor block and is arranged in the rotor, and the balance rings are arranged between the inner ring and the rotor and are respectively connected with the inner ring and the rotor through an inner torsion bar and an outer torsion bar. The invention also discloses a machining method of the silicon-based dynamically tuned gyroscope rotor block structure with three balance rings. The silicon-based dynamically tuned gyroscope rotor block structure with three balance rings can effectively eliminate the influence of double-frequency angular vibration of a single-balance-ring structure, can improve the accuracy of a gyroscope and has low manufacturing requirement for the balance rings and the torsion bars compared with a double-balance-ring structure.

Description

technical field [0001] The invention relates to the design field of micro-electromechanical gyroscopes, in particular to the rotor body structure and processing method of silicon-based three-balanced-ring dynamically adjustable gyroscopes. Background technique [0002] The silicon microgyroscope manufactured by microelectromechanical technology has the advantages of small size, light weight, low cost, high reliability, low power consumption, and mass production. It can be widely used in aviation, automobiles, medical care, photography, electronic consumption, etc. field and has broad application prospects. At present, it has become an important direction for the development of inertial navigators. Many colleges and research institutes at home and abroad are conducting research on MEMS gyroscopes. [0003] An electromechanical gyroscope developed in the 1960s on the traditional dynamic harmonic gyroscope. It is a two-degree-of-freedom gyroscope that suspends the gyro rotor ...

AI Technical Summary

Problems solved by technology

At present, dynamic tuning gyroscope has comprehensive advantages in accuracy, life and cost, and has been widely used in various inertial systems, but its traditional structure, material and processing characteristics directly cause its impact resistance, startup There are problems with time, etc.

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