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Method for storing a pellicle

A technology of dust-proof film components and clean rooms, which is applied in the direction of originals, optics, instruments, etc. for photomechanical processing, and can solve the problems of dust-proof film component pollution, dust-proof film component container pollution, etc., and achieve pollution prevention Effect

Inactive Publication Date: 2012-10-17
SHIN ETSU CHEM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the case of the antistatic type bag, in order to make the bag conductive, the antistatic agent is mixed, or a metal film is deposited on the surface, which causes dust to occur, and the transportation status of the dustproof film module container and If the environment pollutes the pellicle container stored in the bag, or when the pellicle container is taken out of the bag and the cover is opened, antistatic agent, etc. The pellicle contained inside the bag is contaminated

Method used

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  • Method for storing a pellicle
  • Method for storing a pellicle

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] First, the pellicle container for storing the pellicle was placed in the bottom of the bag in the first bag of cleaning specification with a thickness of 70 μm, and the mouth of the bag was sealed with heat seal. Next, the first bag containing the pellicle container was put into the second bag of an antistatic bag with a thickness of 70 μm, and the mouth of the bag was sealed with a heat seal.

[0023] Finally, this second bag was put into a third bag of an antistatic bag having a thickness of 100 μm, and the mouth of the bag was sealed with heat seal. Then put the third bag into a corrugated carton with cushioning material, seal it, place it in a vibration testing machine, 10Hz, and the acceleration of 1G in the up and down direction, and vibrate for 24 hours.

[0024] Then, carry out the thing that has carried out above-mentioned process into the clean room, unseal, the second bag, the surface of the third bag have white thing that is considered to prevent the leakage...

reference example 1

[0027] In Reference Example 1, the first bag and the second bag used a cleaning standard bag with a thickness of 70 μm, and the third bag used an antistatic bag with a thickness of 100 μm. In Reference Example 2, the first bag, the second bag, and the third bag all used cleaning standard bags with a thickness of 70 μm. Except for this, in the same manner as in Example 1, the mouth of the bag was heat-sealed, and after a 24-hour vibration test, the bag was unsealed in a clean room, the storage container was opened, and the product (dust-proof film module) was taken out. The dark room was inspected with a spotlight of 300,000 lux, and the foreign matter on each product did not increase. The results are listed in Table 1 together with the results of Example 1.

[0028] Reference example 3~5

[0029] The first bag used an antistatic bag with a thickness of 70 μm, the second bag, and the third bag were tested in the same manner as in Example 1 except that an antistatic bag or a...

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Abstract

There is provided a method for packing a pellicle container in plastic resin bags, which is meant to prevent foreign particles from reaching the pellicle container and eventually the product pellicle; the points of the invention lie in that bags are either antistatic or of special cleanroom-use grade prepared and preserved in a cleanroom environment.

Description

technical field [0001] The present invention relates to a pellicle storage method for storing products (especially pellicles) produced in a clean room. Background technique [0002] The pellicle for lithography produced in the clean room is stored in a dedicated container and then stored in a resin bag. In order to prevent the pellicle container (box) and the pellicle from being charged, generally, an antistatic type bag is used as the bag. [0003] In the case of the antistatic type bag, in order to make the bag conductive, the antistatic agent is mixed, or a metal film is deposited on the surface, which causes dust to occur, and the transportation status of the dustproof film module container and If the environment pollutes the pellicle container stored in the bag, or when the pellicle container is taken out of the bag and the cover is opened, antistatic agent, etc. The pellicle pack stored inside the bag is contaminated. [0004] In view of the above circumstances, an ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/66
CPCG03F1/66G03F1/62
Inventor 永田爱彦
Owner SHIN ETSU CHEM IND CO LTD