Treatment method for removing arsenic and COD in wastewater in gallium arsenide wafer production treatment simultaneously

A technology for gallium arsenide wafers and processing wastewater, which is applied in chemical instruments and methods, water/sewage multi-stage treatment, water/sludge/sewage treatment, etc., and can solve the problem of not being able to remove arsenic and COD from gallium arsenide wafers at the same time. , to achieve the effect of high operation stability and high processing efficiency

Inactive Publication Date: 2012-11-07
BEIJING MUNICIPAL RES INST OF ENVIRONMENT PROTECTION
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This technology helps clean up harmful substances like arsine (As) or chloraosulfonimides (NaCDIs), which are used during manufacturing processes for semiconductors. It works effectively with both chemical methods that use sulfur dioxide gas and physical techniques called ion implantation.

Problems solved by technology

The technical problem addressed in this patented text relates to treating galliaras containing both heavy metallics such as arsine or selenium together with small amounts of organically bound impurity elements like sulfur dioxide gas which may harm biological systems used for purification purposes during production. Current technologies require multiple steps involving different types of equipment, leading to increased operational cost and potential environmental hazards associated therewith.

Method used

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  • Treatment method for removing arsenic and COD in wastewater in gallium arsenide wafer production treatment simultaneously
  • Treatment method for removing arsenic and COD in wastewater in gallium arsenide wafer production treatment simultaneously
  • Treatment method for removing arsenic and COD in wastewater in gallium arsenide wafer production treatment simultaneously

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Embodiment

[0022] 1) The incoming water flow rate is 10m 3 / h, keep at least 10m in the adjustment reaction pool by controlling the minimum liquid level 3 Reaction solution, (that is, the hydraulic retention time is not less than 1h); quantitatively add ferrous sulfate and hydrogen peroxide, so that the concentration of ferrous ions in the reaction solution is 150mg / L, and the concentration of hydrogen peroxide is 560mg / L. The pH value of the reaction solution is between 2.7 and 2.8, just in the optimum pH reaction range, and no additional pH adjustment is required. The main purpose of this unit is to apply fenton reaction to remove sodium dichloroisocyanurate in raw water and partially remove COD in raw water.

[0023] 2) Lift the wastewater from the adjustment reaction tank to the coagulation sedimentation tank with a pump, and carry out the sequence batch coagulation sedimentation reaction. The process is to inflow water and add ferric chloride to make the final reaction liquid iron ...

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Abstract

The invention relates to a treatment method for removing arsenic and COD in wastewater in gallium arsenide wafer production treatment simultaneously and belongs to the technical field of wastewater treatment. The method includes delivering waste water to an adjusting reaction tank, removing dichlord isocyanurice acid in raw water through the oxidation-reduction reaction and lifting wastewater subjected to the treatment to a coagulating precipitation tank through a pump to conduct sequential batch type coagulating sedimentation reaction. The process flow sequentially includes water feeding, chemical feeding, coagulating, precipitating and water discharging. Treated wastewater is lifted to a sequential batch type activated sludge tank from a middle tank through the pump to be subjected to aerobic biological treatment. The process flow sequentially comprises water feeding, aeration, sedimentation and water discharging. The arsenic and COD density in finally discharged water can achieve the standard of one-grade B in<<pollutant discharge standard of town wastewater treatment factory>>(GB18918-2002). The treatment method can simultaneously remove pollutants including arsenic, dichlord isocyanurice acid, COD and the like in the wastewater in gallium arsenide wafer production treatment, is high in treatment efficiency and high in operation stability.

Description

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Claims

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Application Information

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Owner BEIJING MUNICIPAL RES INST OF ENVIRONMENT PROTECTION
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