Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable
A workbench, nano-level technology, applied in the parts, instruments, casings and other directions of the instrument, can solve the problems of harmful torque, lack of rotational freedom, deformation of the workbench, etc., and achieve the effect of preventing harmful torque and good processing technology.
Inactive Publication Date: 2013-03-13
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
Of the above two workbenches, the former is dominated by axial translation and lacks rotational freedom; while the latter can only rotate around one axis
In addition, this type of workbench is integrated with the flexible structure, which is difficult to process; and the focus point is fixed, which is prone to harmful moments, resulting in deformation of the workbench
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[0022] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.
[0023] Such as Figure 1a with Figure 1b As shown, the example of the present invention includes: a piezoelectric ceramic driver 1, a piezoelectric ceramic driver screw 2, a piezoelectric ceramic driver end cover 3, a piezoelectric ceramic driver end cover screw 4, an outer cylinder 5, a flexible hinge and an outer cylinder screw 6, Flexible hinge 7, flexible hinge and workbench screw 8 and workbench 9; wherein, three flexible hinges 7 are uniformly distributed on one side of workbench 9, and flexible hinge 7 is connected with workbench 9 through flexible hinge and w...
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The invention discloses a Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable which comprises a piezoelectric ceramic drive, a piezoelectric ceramic drive screw, a piezoelectric ceramic drive end cover, a piezoelectric ceramic drive end cover screw, an outer cylinder, a flexible hinge and outer cylinder screw, a flexible hinge, a flexible hinge and worktable screw and a worktable. The Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable is compact in structure and capable of realizing no-coupling movement or positioning with Z-thetax-thetay three-degree-of-freedom nanoscale precision; by using the flexible mechanism and the worktable, the processing manufacturability is good; different materials are used for the flexible mechanism and the worktable, so that the rigidity at a certain part is strengthened or reduced; and moreover, the application force of the flexible mechanism for the worktable can be designed as required, so that the generation of harmful moment is prevented.
Description
technical field [0001] The invention relates to a micro-drive and micro-positioning workbench mechanism in precision machinery technology, in particular to a Z-θx-θy three-degree-of-freedom nanometer-level precision non-coupling motion or positioning workbench. The mechanism adopts a flexible structure and a working It has a two-piece structure; it has good processing technology; it can be used in the fields of optical instruments, precision measurement, biomedicine, and microelectronic device manufacturing. Background technique [0002] Micro-positioning and micro-operation technology are one of the foundations of high-precision instruments. ), etc., have a wide range of applications and requirements. At present, this technology mostly uses piezoelectric ceramics (PZT) as the driver to make its flexible structure or elastic structure elastically deform, so as to realize micro-positioning. [0003] After searching the literature of the prior art, it is found that the Chine...
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IPC IPC(8): G12B5/00G12B9/10
Inventor 翟嘉谭大川吴永前张灿
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI