Line-width measuring method and device
A measurement method and line width technology, applied in measurement devices, nonlinear optics, optics, etc., can solve problems such as poor measurement accuracy, unmeasured line width of strip electrodes, blurred distribution boundaries of strip electrodes, etc., and reach the distribution limit Clear, Increased Accuracy Effect
Active Publication Date: 2015-07-08
BOE TECH GRP CO LTD +1
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Problems solved by technology
However, due to the fuzzy distribution of strip electrodes in the line width measurement area, there have always been problems that the line width of the strip electrodes cannot be measured and the measurement accuracy is too poor
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.
[0034] An embodiment of the present invention provides an array substrate, such as figure 1 , figure 2 As shown, the array substrate includes: a transparent substrate 1, a gate metal layer disposed on the transparent substrate 1, a gate insulating layer 3, an active layer 4, a source-drain metal layer, and a passivation layer 6; wherein, the The gate metal layer includes: patterns 2 of gate lines and gates, and the source-drain metal layer includes: patterns 5 of data lines, source electrodes, and drain electrodes; the array substrate further includes: The first strip electrodes 7 and the second strip electrodes 8 are arranged in the line width measurement areas B1...
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The embodiment of the invention provides an array substrate and a manufacturing method thereof, a display device, a line-width measuring method and a device, which relate to the field of liquid crystal displays and can measure and obtain the line width of a stripy electrode. The array substrate comprises a transparent substrate, a grid metal layer, a grid insulating layer, an active layer, a source-drain metal layer and a passivation layer, wherein the grid metal layer, the grid insulating layer, the active layer, the source-drain metal layer and the passivation layer are arranged on the transparent substrate; the grid metal layer comprises patterns of a grid line and a grid electrode; the source-drain metal layer comprises patterns of a data line, a source electrode and a drain electrode; the array substrate also comprises a first stripy electrode arranged in a pixel area and a second stripy electrode arranged in a line-width measuring area and also comprises a non-transparent pattern arranged at the line-width measuring area; the non-transparent pattern is positioned under the second stripy electrode, and parts of the boundaries of the two sides of at least one second stripy electrode part are positioned in the area of the non-transparent pattern; and the passivation layer at least covers the pixel area.
Description
technical field [0001] The invention relates to the field of liquid crystal displays, in particular to a line width measurement method and device. Background technique [0002] In the TFT-LCD (Thin Film Transistor-Liquid Crystal Display, thin film transistor liquid crystal display) manufacturing industry, the monitoring and measurement of CD (Critical Dimension, key dimension) is very important, and the accuracy of the measurement results will affect the performance of the entire display device . In the ADS (Advanced-Super Dimension Switch, advanced ultra-dimensional field switching technology) type array substrate, the line width of the strip electrodes distributed at intervals is the key dimension of the array substrate, which will affect the transmittance and other performance of the display device. There is a line width measurement area on the array substrate for measuring the line width of the strip electrodes. However, due to the fuzzy distribution boundaries of the ...
Claims
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IPC IPC(8): G02F1/1362G02F1/1343G02F1/13H01L27/02H01L21/77G01B21/02
Inventor 刘耀孙亮丁向前李梁梁白金超
Owner BOE TECH GRP CO LTD