Multifunctional intelligent type laser speckle interference measuring device and method
A technology of laser speckle and interferometry, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of limited scope of application and low degree of intelligence, so as to improve the accuracy of temperature measurement, wide application range, The effect of eliminating spherical aberration
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[0066] An embodiment of the present invention is that a 0.6328um helium-neon laser irradiates a dime metal coin, and the temperature is respectively 20°C, 35°C, and 45°C, and the pressure scale is respectively 0, 5, and 10. The out-of-plane displacement is represented by △L, △L' and △L", respectively.
[0067] In the optical collimation system, the concave and convex surfaces of the negative concave-convex lens 1 and the double-convex lens 2 are coated with a 0.6328um anti-reflection film, and the material is ZF7;
[0068] The positive angle between the beam splitter and the horizontal optical path is 45°, the side close to the optical collimation system is coated with a 0.6328um transflective coating, and the side close to the total reflection mirror is coated with a 0.6328um anti-reflective coating;
[0069] The mirror is a flat mirror, and the side close to the optical path is coated with a 0.6328um high-reflection film;
[0070] In the sample testing system, the fixed pla...
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