An e×b probe
A probe and ion filtration technology, which is applied in the field of ion measurement, can solve the problems of increasing the number of ions, the number of ions received by the long-entrance collimation cylinder, and the large space required, so as to achieve the effect of maintaining stability
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[0041]The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0042] The E×B probe of the present invention is based on the basic structure of velocity filtering, and the particles with a certain velocity are screened out through an orthogonal electromagnetic field. The demand for plume detection has strict requirements on the accuracy of the E×B probe. For plume detection, only ions with the same effective accelerating voltage can be separated from ions with different valence states after the speed selection of the E×B probe. In the plasma detection of the present...
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