83 results about "Ion distribution" patented technology

The invention discloses an aluminum electrolytic capacitor state evaluation method and device, and the method comprises the steps: carrying out the frequency scanning measurement of an electrolyte and oxidation film interface, and obtaining the change data of an interface polarization current phase angle along with the frequency; measuring fluid dynamic characteristics of the electrolyte according to the polarization characteristic parameters, and detecting micro-flow response characteristics; according to the flow distribution data and the evolution data, applying a voltage sequence to carry out ion migration kinetic analysis; carrying out microstructure analysis in a preset temperature change process according to the ion distribution characteristics; and according to the structure change data and the dielectric response data, analyzing the change characteristics of the molecular level, the bubble distribution and the overall performance to obtain a stability evaluation result. According to the technical scheme, through multi-dimensional analysis of the interface polarization characteristic, the fluid dynamic characteristic, the ion migration dynamics and the microstructure change of the electrolyte, effective detection of bubbles and layering phenomena in the electrolyte is realized, and accurate evaluation of the performance state of the capacitor is facilitated.

The invention discloses a manganese-rich precursor, a positive electrode material and a preparation method of the positive electrode material, and relates to the technical field of lithium ion batteries. The invention provides the manganese-rich precursor which does not need to add a complexing agent and is provided with the seed crystal layer and the shell layer, the manganese-rich precursor prepared by the method is low in production cost, safe, environment-friendly and high in sphericity degree, and can effectively improve the distribution uniformity of lithium ions and reduce the residual lithium amount in the charging and discharging process of a sintered positive electrode material; meanwhile, the material is not easy to break during rolling and charge-discharge cycles, the structural integrity of the particles is improved, the particle breaking condition is reduced, and the material cycle performance is improved.

The invention belongs to the technical field of semiconductor device simulation, and particularly relates to a method for rapidly calibrating BDTI surface potential and a related device. The method comprises the following steps: establishing a CIS BDTI device structure through simulation software; introducing silicon data, and calibrating an ion distribution curve in the device structure by taking a true value of SIMS concentration as a reference to obtain a device simulation model for concentration distribution calibration; replacing a surface high dielectric constant layer of the device simulation model for concentration distribution calibration with an electrode layer; and introducing the actually measured potential of the high dielectric constant layer of the device into the electrode layer to complete the surface potential calibration of the device. According to the invention, the surface high dielectric constant layer is directly replaced by the electrode layer, so that the potential of the surface high dielectric constant layer can be directly set as the potential of the actually measured high dielectric constant layer, the process of collecting, continuously increasing and adjusting positive and negative charges for many times and continuously adjusting the potential value of a High K material is avoided, and the calibration process is remarkably shortened.

The invention relates to a perovskite thin film, a passivation method and application, belongs to the technical field of photoelectric functional materials and devices, and aims to solve the problems of low efficiency, poor stability and the like of a solar cell caused by perovskite crystal defects in the prior art. The perovskite thin film passivation method comprises the following steps: adding 1, 4-butane sultone into a perovskite precursor solution to obtain a mixed solution, processing the mixed solution to form a perovskite precursor thin film, and carrying out annealing treatment to obtain the perovskite thin film. By adding BuSO, the nucleation rate of perovskite can be effectively reduced, so that the large-grain and high-quality perovskite thin film is obtained, the BuSO can be subjected to halogen ion induced ring-opening reaction in the annealing process, generated chain ions are distributed on the grain boundary and the surface and act with perovskite, compounding of a bulk phase and an interface is reduced, and the performance of the perovskite thin film is improved. And the efficiency and the long-term stability of the solar cell are effectively improved.

The invention discloses a quick charging safety control method for a mobile power supply, and particularly relates to the technical field of charging control of an electrochemical energy storage device. The method is started when a charging adapter is connected after the mobile power supply completes high-power discharging, and an ion relaxation index is obtained through open circuit detection; entering rhythm cycle control of charging-charging stopping-measuring, and limiting current according to risk levels; the charging current and the charging stopping duration are adjusted in a self-adaptive mode according to the ion relaxation index and the terminal voltage change rate in the circulation, finally, when the index is stabilized within the safety range, the constant-current and constant-voltage charging stage is smoothly switched, and safety control over rapid charging is achieved; according to the method, the distribution state of the battery cell ions is accurately detected before charging, current is limited in a graded mode according to risk grades in rhythm slow start, dynamic optimization of the charging current and the charging stopping duration is achieved in combination with self-adaptive adjustment, a constant current stage and a constant voltage stage are smoothly switched to when the state is stable, and safety and efficiency are both considered in the whole process.

The invention discloses a hydraulic concrete ion transmission method based on a real pore structure and solution composition, and relates to the technical field of ion transmission. Comprising the following steps: constructing a multi-scale diffusion model based on fractal dimensions; obtaining a pore network based on a multi-scale diffusion model, and forming an electrochemical potential gradient through a local micro-region of the pore network; constructing an ion transmission model based on the electrochemical potential gradient, the capillary action parameter and the convection parameter; and evaluating an ion transmission result based on the ion transmission model. According to the method, the electrochemical potential gradient, capillary action parameters and convection parameters are considered, the constructed ion transmission model can well reproduce the ion distribution in the test, and the ion distribution in the concrete at different stages can be accurately predicted.

The invention discloses a garnet-structured near-infrared luminescent scintillator, and the preparation method of the scintillator adopts an improved high-temperature solid phase method, and successfully prepares a Cr < 3 + > and Sb < 3 + > doped scandium gallium garnet scintillator through the process steps of batching, grinding, pre-sintering, high-temperature sintering, re-sintering and the like. Specifically, an oxide precursor is accurately mixed according to a stoichiometric ratio, and is sintered under a high-temperature condition (the sintering temperature is 1400-1600 DEG C). In the process, the crystal structure of the material is gradually formed, and meanwhile, doping ions are promoted to be uniformly doped into crystal lattices of the scandium gallium garnet by controlling the sintering time and temperature. In the crystal growth process, the local electronic environment in crystal lattices is optimized through selection and ion doping of A-site ions, and efficient transfer of excited state energy from a matrix to a light-emitting center is promoted. Under the processes of pre-sintering, high-temperature sintering, re-sintering and the like, doped ions in the crystal are distributed more uniformly, the formation of a non-radiative recombination center is reduced, and the luminous efficiency and the stability of the scintillator are improved.

The invention relates to the technical field of Penning ion sources, and discloses a Penning ion source kinetic simulation collision method, which comprises the following steps: carrying out integration on an ion distribution function of a current time step in a three-dimensional velocity space to obtain a first parameter, carrying out weighted integration on the first parameter and an axial velocity component in the ion distribution function to obtain a second parameter, according to the method, the overall numerical value collision term expression of the algorithm is simple, no differential operator or integral operator exists, only simple moment integral, exponential function operation and arithmetic operation are needed, but the transportation, perpendicular to the magnetic field direction, of ions brought by collision can be completely simulated, and compared with the prior art, the method has the advantages that the simulation efficiency is high; according to the method, a part of physical steps are omitted, a collision calculation algorithm is simplified, the calculation amount of simulation is reduced, the problems of numerical instability and divergence in simulation are solved, and the transportation process of ions in the direction perpendicular to the magnetic field can still be efficiently and accurately described.

The invention discloses an equivalent amplification design method of an electrolytic bath for uranium electrolytic refining in a dry post-treatment process, and belongs to the field of spent fuel post-treatment. According to the method, the influence of a stirring device on uranium ion distribution in a molten salt electrolytic bath and the uranium electrolytic refining rate and yield is obtained through a simulation result, the optimal rotating speed of the stirring device is determined, and then the stirring Reynolds number and the end face speed are further determined as amplification criteria of the electrolytic bath; after the amplification design is carried out, the change condition of each amplified key parameter is estimated by virtue of simulation software, and meanwhile, the influence on uranium ion distribution in the molten salt electrolytic bath and the uranium electrolytic refining rate and yield under different amplification criteria is compared and analyzed, so that an optimal amplification criterion is obtained; and finally completing equivalent amplification design of the electrolytic bath for uranium electrolytic refining in the dry post-treatment process, thereby realizing amplification design of the molten salt electrolytic bath. By adopting the method disclosed by the invention, the design and amplification of the electrolytic cell can realize precision and high efficiency, and the time cost and the capital investment are saved.

This invention discloses a sheet-like porous cobalt chloride, a single-crystal cobalt tetroxide, a single-crystal lithium cobalt oxide, and their preparation methods and applications, belonging to the field of battery materials technology. The chemical formula of the sheet-like porous cobalt chloride is M. x Co 1‑x Cl2, 0≤x≤0.5, M is a metallic element other than cobalt; the tap density of this sheet-like porous cobalt chloride is not less than 1 g / cm³. 3 Specific surface area not less than 1.8m² 2 / g、D v10 Not less than 4.5μm, D v50 Not less than 8.5μm, D v90 The diameter is not less than 20 μm. This sheet-like porous cobalt chloride has a high tap density, a large specific surface area and pore volume, and a relatively uniform pore size, which is beneficial to increasing sintering activity. Moreover, when it is mixed with lithium source for calcination, its sheet-like porous structure is also conducive to the uniform diffusion of lithium ions into the bulk phase of the material, making the lithium ion distribution more uniform, which in turn helps to improve the electrochemical performance of the cathode material and the battery.

The invention discloses a ferroelectric material composite solid electrolyte and a preparation method and application thereof, the ferroelectric material composite solid electrolyte comprises an alkali metal ion salt and an electrolyte, and the electrolyte comprises a ferroelectric material and a polymer; the ferroelectric material comprises at least one of NaNbO3, KNbO3, BiFeO3, TbMnO3, LiTaO3 and Li2B4O7, and the ferroelectric material comprises at least one of NaNbO3, KNbO3, BiFeO3, TbMnO3, LiTaO3 and In the ferroelectric material composite solid electrolyte, the crystallinity of the polymer can be effectively reduced by the ferroelectric material, so that the ionic conductivity of the solid electrolyte is remarkably improved; the ferroelectric material can generate a reverse electric field in the battery circulation process to counteract the alkali metal tip potential at the interface, so that the ion distribution at the electrolyte / electrode interface is adjusted, the uniform deposition of alkali metal is promoted, the safety of the battery is improved, and the cycle life of the battery is prolonged. In addition, due to the spontaneous polarization characteristic of the ferroelectric filler, a uniform electric field can be generated in the electrolyte, and ion transport kinetics is enhanced.

The present disclosure describes a system and a method for an ion implantation (IMP) process. The system includes an ion implanter configured to scan an ion beam over a target for a range of angles, a tilting mechanism configured to support and tilt the target, an ion-collecting device configured to collect a distribution and a number of ejected ions from the ion beam scan over the target, and a control unit configured to adjust a tilt angle based on a correction angle determined based on the distribution and number of ejected ions.

The application discloses a kind of water concrete ion transport methods based on real pore structure and solution composition, it is related to ion transport technical field. Including: based on the construction of multiscale diffusion model of fractal dimension;Pore network is obtained based on multiscale diffusion model, and local micro-region is formed through pore network electrochemical potential gradient;Based on electrochemical potential gradient, capillary action parameter and convection parameter, ion transport model is constructed;Based on ion transport model, ion transport result is evaluated.The ion transport model constructed by considering electrochemical potential gradient, capillary action parameter and convection parameter established by the application can well reproduce the distribution of ions in the test, and the ion distribution in the concrete at different stages can be accurately predicted.

This invention discloses an image sensor and its manufacturing method. The method includes: Step S1, providing a wafer including a substrate and a plurality of gates formed on the substrate, with adjacent gates forming a gate spacer; the substrate is ion-implanted to form an active / drain region; Step S2, depositing an oxide layer on the surface of the gate spacer and above the gates; Step S3, performing high-temperature rapid annealing on the wafer to activate the active / drain regions; Step S4, depositing a silicon nitride layer on the oxide layer surface using an HCD process. This invention, by depositing a silicon nitride layer using the HCD process, not only avoids lattice damage caused by plasma in existing deposition processes, but also, due to the high process temperature and long processing time of the HCD process, the prolonged and sufficiently high temperature heat treatment effectively improves the uniformity of implanted ion distribution and lattice repair, thereby significantly improving WP performance by approximately 35%.

The invention provides a preparation method of continuous pure-phase alpha-Ni (OH) 2 capable of stabilizing pH and realizing uniform ion doping. A NiSOsolution, ammonia water and a mixed solution doped with metal salt-NaOH are injected into a reaction kettle in different paths through a four-path feeding system, a fourth path of bypass compensation liquid with the same components is additionally arranged, the liquid supplementing flow speed is dynamically regulated and controlled according to the real-time pH value, and the pH value is maintained within the range of 11.0-13.0 + / -0.2. The method synchronously stabilizes the doped ion concentration and the reaction environment, inhibits beta phase generation, realizes continuous production of alpha-Ni (OH), is uniform in product ion distribution, and is suitable for manufacturing high-energy-density electrode materials such as supercapacitors and alkaline zinc-nickel batteries.

The utility model relates to semiconductor ion implantation equipment technical field, and disclose a kind of multi-functional high-efficiency boron fluoride ion implantation chamber, including support connecting mechanism, sealing assembly, support connecting mechanism contains chamber main body, internal injection component, multifunctional component assembly interface, upper sealing ring assembly groove, side sealing ring assembly groove, top connecting hole, top auxiliary sealing ring assembly groove, side fixed base, assembly interface sealing ring assembly groove, through slot, toughened glass sheet.The utility model is through the curved surface gradual change flow guide structure of internal injection component, boron fluoride ion distribution in chamber is accurately controlled, ion distribution uniformity is significantly improved, guarantee semiconductor material doping consistency, effectively improve device manufacturing yield, adapt high-precision semiconductor process demand.

The present invention provides a high-nickel ternary cathode material with a lithium fast ion conductor as a coating layer, a preparation method thereof, and an application thereof. The chemical formula of the lithium fast ion conductor is: Li4MP2O9; wherein, M is Ti or V; the crystal structure of the lithium fast ion conductor is: PO4 tetrahedrons and MO6 octahedrons are connected by sharing vertices to form a one-dimensional chain structure, and Li ions are distributed between the chains and can diffuse freely in at least three directions; the cathode material has a core-shell structure and includes a core and a coating layer; the material of the core includes a lithium nickel cobalt manganese oxide cathode material. The ternary cathode material provided by the present invention uses a lithium fast ion conductor as the coating layer, enriches the diffusion path of lithium ions, improves the lithium ion content and ionic conductivity, reduces the impedance of the lithium fast ion conductor as the coating layer of the cathode material, and thus realizes the fast charge and discharge and high-temperature cycling performance of the lithium ion battery.

The utility model relates to a flow guide net cover for ion fan, belongs to the field of static electricity elimination. Set up a flow guide net cover, set up three second annular flow guide plates with the certain angle of direction with air outlet and / or air inlet direction in the edge position of flow guide net cover and ion fan metal net cover corresponding, adopt four fixed ribs with installation clamping groove to be fixed together between each annular flow guide plate, the whole flow guide net cover is clamped into metal net cover through installation clamping groove, and is fixed with metal net cover integral. Through the second annular flow guide plate of wide angle setting, can make ion fan form wide angle ion wind, and then form greater range positive and negative ion distribution, enlarge the electricity elimination range of ion fan. Can be widely used in the field of ion fan design and manufacture.

The application discloses a buffer cavity structure of a Hall thruster and the Hall thruster, and relates to the technical field of Hall thrusters. The buffer cavity structure comprises: at least two air inlet components, each having an air inlet, and the other end of each air inlet component being connected to a first buffer cavity; the first buffer cavity is used for connecting the air inlet components, and the side wall of the first buffer cavity is provided with a first air hole, so that the first air hole is communicated with a second buffer cavity; the second buffer cavity is provided with a second air hole, and the second buffer cavity is sealed based on the first buffer cavity except the second air hole; and the position of the second air hole does not correspond to the position of the first air hole. The buffer cavity structure optimizes the structure of the air supply buffer cavity of the Hall thruster, so that the air outlet speed of the buffer cavity is more uniform, and the uniformity of ion distribution is improved.

There is provided an ion milling apparatus that can enhance reproducibility of ion distribution.The ion milling apparatus includes an ion source 101, a sample stage 102 on which a sample processed by radiating a non-convergent ion beam from the ion source 101 is placed, a drive unit 107 that moves a measurement member holding section 106 holding an ion beam current measurement member 105 along a track located between the ion source and the sample stage, and an electrode 112 that is disposed near the track, in which a predetermined positive voltage is applied to the electrode 112, the ion beam current measurement member 105 is moved within a radiation range of the ion beam by the drive unit 107, in a state in which the ion beam is output from the ion source 101 under a first radiation condition, and an ion beam current that flows when the ion beam is radiated to the ion beam current measurement member 105 is measured.

The invention discloses a polyphosphazene modified battery diaphragm material with an ion regulation and control function. The polyphosphazene modified battery diaphragm material is obtained by modifying a battery diaphragm base material through polyphosphazene containing a functional group X, the functional group X is selected from one of an alkoxy group, an aryloxy group, a fluorine-containing alkoxy group, a fluorine-containing aryloxy group, a thiol group and a carboxyl group, and the polyphosphazene is linear polydichlorophosphazene prepared by thermally polymerizing phosphonitrilic chloride trimer at 230-300 DEG C for 24-48 hours under the protection of argon; the polyphosphazene containing the functional group X is prepared by carrying out nucleophilic substitution reaction on the functional group X and linear polydichlorophosphazene, and is marked as PZ-X polyphosphazene. The polyphosphazene modified battery diaphragm material disclosed by the invention can regulate and control ion distribution and realize uniform transmission of Li < + > in the diaphragm, so that the growth of lithium dendrites is effectively inhibited, and the electrochemical performance, the cycling stability and the safety level of a battery are remarkably improved.

The application provides a nickel plating solution for a circuit board and a preparation method thereof, and steps of the preparation method include the following: mixing a boron source, a nickel source and a complexing agent to obtain a primary mixture, adjusting the pH of the primary mixture to be acidic; adding a chloride medium to the primary mixture, and then adding a copper source to the primary mixture after pre-complexing treatment, and controlling the molar ratio of copper ions to nickel ions to be within a preset range to obtain an intermediate mixture; adding a reducing agent and a deposition regulation component to the intermediate mixture in batches, uniformly mixing under stirring, and then performing filtration and aging treatment to obtain the nickel plating solution for the circuit board. Through the above steps, the nickel plating solution can maintain stable reaction activity and ion distribution during the deposition process, so that the deposition rate and the uniformity of the plating layer thickness are improved.

In order to overcome the technical problem that the diffusion condition of heavy metal ions in soil along with the change of environmental conditions and time cannot be detected, the invention provides an experimental modeling method for the diffusion process of the heavy metal ions in the soil. The filled to-be-studied soil is equivalent to the soil condition of a remediation site with a certain depth, a plurality of sealed sampling test ports are formed in the cylinder, an artificial channel port capable of sampling is established, heavy metal ion sample soil with different depths is collected at different time and different positions to obtain data, and meanwhile, the sampling test port is used for sampling the heavy metal ion sample soil. And providing a candidate model of soil heavy metal ion diffusion, providing error description according to the obtained data, and determining the model through a system identification method and applying the model to prediction and estimation of heavy metal ion distribution.

This invention relates to a method for growing a single-crystal optical fiber with a tunable distribution of doped ions, comprising: (1) selecting a crystal or ceramic with a uniform doped ion concentration of n at% and cutting a homogeneous crystal or ceramic without doped ions into square rods, and then cutting, polishing and splicing them according to the tangent designed on the side to obtain a first source rod; (2) using a crystal or ceramic without doped ions as a seed crystal, fixing the obtained source rod in a laser-heated base single-crystal optical fiber growth furnace, and performing a first forward growth of the single-crystal optical fiber using the laser-heated base method; (3) using the single-crystal optical fiber grown in the first forward growth as a second source rod for a first reverse growth; (4) using the single-crystal optical fiber grown in the first reverse growth as a third source rod for a second forward growth; (5) using the single-crystal optical fiber grown in the second forward growth as a fourth source rod for a second reverse growth to obtain the single-crystal optical fiber with a tunable distribution of doped ions.

The application relates to a device and method for producing mineralized drinking water by coupling nanofiltration and electrodialysis, and relates to the technical field of water treatment. The device solves the problem that nanofiltration membranes remove a variety of pollutants while removing a variety of natural mineral ions beneficial to human bodies, and the problem that the separation performance of nanofiltration membranes is insufficient in matching the separation target. The device comprises the following steps: introducing, into a nanofiltration unit, pretreated water containing ions and potential organic pollutants through the inlet of the nanofiltration unit; obtaining first dilute water and first concentrated water through nanofiltration separation; introducing the first dilute water and the first concentrated water into a first reverse electrodialysis unit respectively; performing ion redistribution in the first reverse electrodialysis unit; introducing second concentrated water after the redistribution into a second reverse electrodialysis unit; performing ion distribution with second water treated by a nanofiltration-gravity flow ultrafiltration system; obtaining second effluent flowing out of the second reverse electrodialysis unit; and returning third concentrated water obtained after the distribution to the nanofiltration unit. The application is applied to the field of drinking water production.

The invention relates to a method for producing nickel foil through a nickel aminosulfonate process, and belongs to the technical field of metal foil production. According to the nickel aminosulfonate process provided by the invention for producing the nickel foil, the nickel foil with better surface quality and more excellent mechanical property and electrical property can be obtained by optimizing a plating solution formula and process parameters, the plating solution is circularly circulated by adopting a solution supply circulating device in the electroplating process, and ions in the plating solution can be more uniformly distributed through circular circulation; nickel ions consumed on the surface of the cathode are supplemented, meanwhile, escape of gas such as hydrogen is facilitated, defects such as pinholes are reduced, and the uniformity of the quality of a plating layer is improved.

Provided is an ion milling apparatus capable of enhancing reproducibility of an ion distribution. The ion milling apparatus includes: an ion source 101; a sample stage 102 on which a sample to be processed by being irradiated with an unfocused ion beam from the ion source 101 is placed; and a measurement member holding unit 106 that holds an ion beam current measurement member 105. A covering material 120 is provided so as to cover at least a surface of the measurement member holding unit 106 and the sample stage 102 facing the ion source 101. A material of the covering material 120 contains, as a main component, an element having an atomic number smaller than that of an element of a material of a structure on which the covering material is provided. The ion beam current measurement member 105 is moved in an irradiation range of the ion beam on a trajectory, which is located between the ion source and the sample stage, in a state where the ion beam is output from the ion source 101 under a first irradiation condition, and an ion beam current flowing when the ion beam current measurement member 105 is irradiated with the ion beam is measured.

The utility model discloses maintenance equipment for a sacrificial anode, and belongs to the technical field of steel bar repair and protection. The maintenance equipment for the sacrificial anode comprises a connection unit, a maintenance unit and a control unit, the connection unit is provided with a connection channel, and the connection channel is used for being communicated with a maintenance channel of the sacrificial anode; the new gel injection unit is communicated with the connecting channel of the connecting unit and is used for injecting new maintenance gel into the sacrificial anode; and the waste gel extraction unit is communicated with the connecting channel of the connecting unit and is used for extracting the waste gel in the sacrificial anode. By adopting the maintenance equipment disclosed by the utility model, the protection gel in the maintainable embedded sacrificial anode can be conveniently replaced in time, so that the requirements of sacrificial metal on working environments such as long-term working humidity, pH value, ion distribution and the like are met.

A filter assembly of a vehicle-mounted air purification system comprises a filter element body, an ion generating device and a connecting mechanism, the ion generating device is detachably installed on the filter element body through the connecting mechanism, the filter element body comprises a plurality of spacers arranged at intervals, a ventilation gap is formed between every two adjacent spacers, and the ion generating device is detachably installed on the filter element body through the connecting mechanism. The end, close to the air outlet side, of the spacer is connected with a filter screen, the connecting mechanism comprises a mounting part and a fixing part, the mounting part is connected with the ion generation device, and the fixing part is matched with the ventilation gap so as to be detachably connected with the filter element body; the position of the ion generation device relative to the filter element body can be conveniently adjusted according to requirements, so that negative ions are uniformly distributed, the efficiency of adsorbing impurities in air can be improved, and the air purification quality is improved.

The utility model provides an electroplating bath body for improving wafer film forming quality, which is applied to the technical field of wafer electroplating and comprises a chamber base body, an anode cage, an ionic membrane frame, an ionic resistive element and a turbulent flow mechanism, a cation exchange membrane is mounted on the ionic membrane frame, and divides the chamber base body into an anode chamber and a cathode chamber; the anode cage is located in the anode chamber, a plurality of circular baffles are arranged on the anode cage, an annular structure is formed, the interior of the anode cage is divided into a plurality of annular areas, and the heights of the circular baffles are different; the ion resistive element and the turbulent flow mechanism are located in the cathode chamber, the ion resistive element is provided with an overflowing area, and the overflowing area is composed of a plurality of overflowing holes; the turbulent flow mechanism comprises a turbulent flow plate and a driving assembly, and the turbulent flow plate is driven by the driving assembly to do reciprocating translation. Through mutual cooperation of the anode cage, the ion resistive element and the turbulent flow mechanism, ion distribution and fluid movement in the cavity are regulated and controlled together, and the uniformity of ion and flow field distribution is improved.