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Physical Quantity Sensors and Electronic Equipment

A technology of physical quantity sensor and moving electrode, which is applied in the direction of instruments, measuring devices, measuring acceleration, etc., and can solve the problem of incapable of wiring capacitance equivalent

Inactive Publication Date: 2018-01-12
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that different parasitic capacitances are generated between the drawn wirings drawn from the fixed electrodes of the upper and lower capacitive elements, and it is impossible to make the respective wiring capacitances equivalent.

Method used

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  • Physical Quantity Sensors and Electronic Equipment
  • Physical Quantity Sensors and Electronic Equipment
  • Physical Quantity Sensors and Electronic Equipment

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Embodiment Construction

[0039] Hereinafter, preferred embodiments of the present invention will be described in detail using the drawings. In addition, the embodiment described below is not an embodiment that unreasonably limits the content of the present invention described in the claims. In addition, not all the structures described below are necessarily essential components of the present invention.

[0040] 1. The physical quantity sensor according to the first embodiment

[0041] First, the physical quantity sensor 100 according to the first embodiment will be described with reference to the drawings. The physical quantity sensor 100 according to this embodiment can be used, for example, as an inertial sensor. Specifically, for example, it can be used as an acceleration sensor (capacitive acceleration sensor, Capacitive MEMS acceleration sensor) for use.

[0042] However, the configuration of movable body 20 applied to physical quantity sensor 100 according to the present embodiment is not li...

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Abstract

The present invention provides a physical quantity sensor and an electronic device, wherein capacitive elements are provided above and below a movable body, and the difference in wiring path length from each fixed electrode to an external terminal can be reduced. The physical quantity sensor includes: a first substrate with a first fixed electrode portion disposed on a first base surface and a first through hole penetrating through the front and rear; a second substrate with a second fixed electrode portion disposed on a second base surface. The fixed electrode part and the second through hole penetrating the front and back are arranged so that the first base surface and the second base surface face each other; the movable body is arranged on the first substrate with a gap therebetween. Between the second substrate and provided with a movable electrode portion opposite to the first fixed electrode portion and the second fixed electrode portion, and provided in the first through hole in contact with the first fixed electrode portion. A first through-electrode electrically connected to the electrode portion, and a second through-electrode electrically connected to the second fixed electrode portion is provided in the second through-hole.

Description

technical field [0001] The invention relates to a physical quantity sensor and electronic equipment. Background technique [0002] In recent years, physical quantity sensors such as inertial sensors that detect physical quantities using, for example, silicon MEMS (Micro Electro Mechanical System) technology have been developed. [0003] For example, Patent Document 1 discloses a capacitive physical quantity sensor for detecting acceleration. In this physical quantity sensor, a movable sensor unit is arranged between an upper support substrate and a lower support substrate, and Electrodes arranged to face the sensor section are formed on the upper support substrate and the lower support substrate, and capacitive elements are formed above and below the sensor section. [0004] However, in the physical quantity sensor of Patent Document 1, wiring terminals (terminals for external connection) electrically connected to capacitive elements formed above and below the sensor portio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125G01C19/5712G01P15/14
CPCG01P2015/0831G01P15/125
Inventor 纸透真一
Owner SEIKO EPSON CORP
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