Stator element and high-vacuum pump
A high vacuum pump and rotor element technology, applied in pump elements, pumps, axial flow pumps, etc., can solve problems such as flow reduction, improve flow, and promote pumping.
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[0020] In the illustrated embodiment, the high vacuum pump has a turbo molecular pump 10. The turbomolecular pump 10 has a rotor 16 arranged on a bearing 14 in a housing 12. The rotor 16 has a plurality of rotor elements 18 each having a plurality of rotor blades. A stator element 20 is arranged between the rotor elements 18 and is fixed in the housing 12 via a stator ring 22. By means of the turbomolecular pump 10, the gas is conveyed in the conveying direction 26 through the pump inlet 24.
[0021] A housing element 28 is connected to the housing 12 of the turbomolecular pump 10. The housing element 28 has a stator connecting piece 32 on its inner side 30. The stator connecting piece 32 is arranged directly adjacent to the last rotor element in the conveying direction 26, so that no further intermediate elements, in particular no stator element, are provided between the last rotor element 18 and the stator connecting piece 32.
[0022] A rotor hub 38 configured in a cylindric...
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