Gas path control system of vacuum adsorption platform
A vacuum adsorption platform and vacuum adsorption technology, applied in the direction of pneumatic program control, jet program control, etc., can solve problems such as difficult material retrieval, and achieve the effect of simple structure
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0014] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0015] Such as figure 1 As shown, the present embodiment provides an air path control system of a vacuum adsorption platform, which is used for adsorbing and fixing the sheet-shaped material when the etching machine processes the sheet-shaped material. The gas circuit control system of the vacuum adsorption platform includes a vacuum adsorption workbench 10, a first gas distribution seat 20, a direct current valve 30, a first vortex air pump 40, a second gas distribution seat 50, a pressure regulating filter 60, and a flue gas purification Cover 70, second vortex air pump 80, solenoid valve 90 and...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com