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Laser light path beam splitting system and method thereof

A spectroscopic system and optical path technology, applied in optics, optical components, instruments, etc., can solve problems such as unsatisfactory effects, affecting beam energy stability, and destroying beam quality

Active Publication Date: 2015-06-03
HANS CNC SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This kind of light splitting method needs to interact with the crystal, and the crystal itself will absorb part of the laser energy. Although there is a cooling system to cool the crystal, it cannot completely eliminate the thermal influence.
The thermal effect causes the crystal to produce a thermal lens effect and destroy the beam quality, and the thermal effect will affect the stability of the beam energy after splitting
Therefore, the effect of this kind of light splitting method is not ideal.

Method used

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  • Laser light path beam splitting system and method thereof
  • Laser light path beam splitting system and method thereof
  • Laser light path beam splitting system and method thereof

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Embodiment Construction

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] In order to express the purpose, technical solutions and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0025] Embodiment 1 of the present invention provides a laser beam splitting system, including at least one beam polarization fine-tuning device 100 and a beam splitting device 200 .

[0026] A lens group is installed on the light beam polarization state fine-tuning device 100, and the lens group includes a first TFP lens 101 and a reflector 102, and the second TFP lens is arranged on the beam splitting device.

[0027] The first TFP lens 101 uses ZnSe as the base m...

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Abstract

The invention discloses a laser light path beam splitting system and a method thereof. The laser light path beam splitting system comprises at least one light beam polarization state trimming device and a beam splitting device. A lens group is clamped on the light beam polarization state trimming device and includes a TFP (thin film polarizer) lens and a reflector. The TFP lens is utilized to split beams and the light beam polarization state trimming device is turned to trim incident light polarization state reflected on the TFP lens, so that two light beam energy after beam splitting is balanced.

Description

【Technical field】 [0001] The invention relates to a laser light path splitting system and a corresponding method. 【Background technique】 [0002] With the continuous development of laser technology, laser processing has increasingly become a mainstream processing method. At the same time, material processing and excimer lithography, medical cosmetology, instruments and sensors and other markets are constantly demanding harsh processing requirements, providing laser processing with a space and environment for growth. [0003] At present, for multi-axis laser processing equipment with more than two axes, in order to facilitate operation, reduce individual differences in processing quality between axes, and reduce production costs, laser processing equipment usually uses a laser as a laser light source and splits light in the optical path system. for multi-axis machining. There are many ways of splitting light in the optical path system of laser processing equipment, mainly d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/10
Inventor 郭裕强李强高云峰
Owner HANS CNC SCI & TECH