Zero-rigidity magnetic-suspension active vibration isolator and six-degree-of-freedom vibration isolation system consisting of vibration isolator

Abstract

The invention provides a zero-rigidity magnetic-suspension active vibration isolator and a six-degree-of-freedom vibration isolation system consisting of the vibration isolator, and belongs to the field of precise vibration isolation. The zero-rigidity magnetic-suspension active vibration isolator comprises a permanent-magnetic passive vibration isolation unit, an active vibration isolation unit and a safe limiting assembly; the permanent-magnetic passive vibration isolation unit comprise an upper magnet, a lower magnet, a middle magnet and related connection components, and all of the magnets are rectangular magnets; the active vibration isolation unit can apply location control and vibration active control in vertical and horizontal directions, and comprises a Lorentz motor, a speed sensor and a displacement sensor; the safe limiting assembly has mechanical horizontal regulation and limiting safety protection functions. The zero-rigidity magnetic-suspension active vibration isolator provided by the invention has zero rigidity in the horizontal direction, and has the characteristic of quasi-zero rigidity while having the bearing capacity in the vertical direction; the six-degree-of-freedom vibration isolation system consisting of the zero-rigidity magnetic-suspension active vibration isolator is suitable for precise machining and measuring devices sensitive to low-frequency vibration.

Description

technical field [0001] The invention belongs to the field of precision vibration isolation, and in particular relates to a zero-stiffness magnetic suspension active vibration isolator and a six-degree-of-freedom vibration isolation system formed therefrom. The zero-stiffness magnetic suspension active vibration isolator involved in the present invention has a compact structure, and a six-degree-of-freedom vibration isolation system has the characteristic of quasi-zero stiffness. Background technique [0002] As the vibration requirements of precision machining and measurement equipment become more stringent, improving the performance of vibration isolators becomes more and more important. Introducing active vibration control and reducing the stiffness of the isolator are two effective methods to improve the vibration isolation performance. [0003] Active vibration control can effectively attenuate the vibration in the frequency band near the natural frequency of the system...

AI Technical Summary

Problems solved by technology

However, due to its gas leakage, it cannot be applied in a vacuum environment

Images