Manufacturing method of force sensing resonant element

Abstract

The invention discloses a force sensing resonant element and a manufacturing method thereof. The force sensing resonant element comprises two bases and two resonant beams, wherein at least one of the front side and the back side of each resonant beam is provided with grooves, the inner wall of each groove and the lateral wall of each resonant beam are respectively covered by an electrode, the vibration directions of the two resonant beams are opposite through the setting of the direction of an excitation power supply, the grooves in each side of each resonant beam at least relate to end grooves located in the two ends of the resonant beam, and each end groove is composed of two end deep groove bodies which are arranged in two sides in parallel and an end shallow groove body located between the two end deep groove bodies and connected with the two end deep groove bodies into a whole. According to the force sensing resonant element, the distance between acting surfaces of the electrodes is short, the field intensity in the resonant beams is increased, the excitation efficiency of the electrodes is improved, and therefore the force sensing resonant element is more suitable for microminiaturization manufacturing of sensors; the deep groove bodies are formed, the steep degree of the lateral wall of each groove is increased, therefore, the excitation efficiency of the electrodes is improved, and the excitation efficiency of the resonant beams is improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a force-sensitive resonant element applied to a micro-mechanical sensor and a manufacturing method of the force-sensitive resonant element. Background technique [0002] As a sensor for detecting mechanical parameters, micromechanical sensors have been widely used in many fields. According to different detection principles, mechanical sensors can be divided into capacitive, piezoresistive, resonant and other types, among which the resonant type has high sensitivity and frequency output, and can be directly connected to digital circuits for signal processing without modulus Signal conversion has become an important research direction at present. The force-sensitive resonant element is the sensitive element of the resonant mechanical sensor and the core component of the resonant mechanical sensor. Its structure and parameters will directly affect the overall performance of the sen...

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Problems solved by technology

This patent designs a pressure sensor that uses a rectangular cross-section and double vibrating beams vibrating in opposite directions as the resonant element, which is more suitable for low-cost mass production using micromachining technology, but the resonant beam adopts a rectangular cross-section structure, and the excitation efficiency of the electrodes is low. Low, with the further reduction of the component size, the excitation vibration amplitude of the vibrating beam will also decrease, and the stability will deteriorate

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