Quartz resonant element

A technology of resonant components and quartz, which is applied in the field of resonators, can solve problems such as poor symmetry, limited increase in electric field strength, and low resonance stability of resonant components, and achieve the effects of enhanced stability, increased field strength, and improved excitation efficiency
CN103501166BActive Publication Date: 2016-06-08CHINA ELECTRONICS TECH GRP NO 26 RES INST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHINA ELECTRONICS TECH GRP NO 26 RES INST
Publication Date
2016-06-08

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Abstract

The invention discloses a quartz resonant element, which comprises a base and two resonant beams, at least one of the front and back sides of the resonant beam is provided with a groove, and the groove is composed of parallel deep grooves on both sides and two deep grooves A shallow groove is formed between the grooves and connected with two deep grooves. The inner wall of the groove and the two side walls of the resonant beam are respectively covered with electrodes, and the two resonant beams are connected with different polarities of the excitation power to make their vibration directions opposite. The quartz resonant element is provided with a deep groove, which increases the steepness of the side wall of the groove, shortens the action distance between the exciting electrode pairs, increases the field strength in the resonant beam, and improves the excitation efficiency of the electrodes. It is suitable for resonators. Miniaturization. In addition, after the deep groove is set, the symmetry of the left and right ends of a single resonant beam is effectively improved, the left and right resonant beams vibrate in opposite directions, and the resonance stability of the resonant element is enhanced.
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Description

technical field

[0001] The invention relates to the technical field of resonators, in particular to a quartz resonant element applied to micro-resonators. Background technique

[0002] As a device that outputs a fixed frequency, a microresonator has been widely used in many fields. The resonant element is the core component of the resonator, and its size and performance will directly determine the size and performance of the resonator. Quartz crystal has high quality factor, good temperature stability, and can be processed by micro-machining technology. It is often used as the base material of high-stability resonant components. With the continuous reduction of the volume of the quartz resonant element, the dynamic impedance value during resonance also increases, the stability decreases, and the power consumption increases.

[0003] In order to reduce the dynamic impedance value of the quartz resonant element and improve the resonance efficiency, the U.S. patent "Resonator...

Claims

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