Thin film deposition apparatus, method of manufacturing organic light-emitting display device, and display device

Abstract

The invention discloses a thin film deposition apparatus, method of manufacturing organic light-emitting display device, and display device. The thin film deposition apparatus comprises a plurality of thin film deposition assemblies, each of which includes: a deposition source that includes a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet arranged opposite to the deposition source nozzle unit and having a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates arranged in the first direction, the barrier plate assembly being arranged between the deposition source nozzle unit and the patterning slit sheet. The thin film deposition apparatus and substrate are separated from each other and are movable relative to each other. The deposition material includes a material to produce the thin film of a red (R), green (G) or blue (B) emission layer, or an auxiliary layer.

Description

[0001] This application claims priority and claims the benefit of Korean Patent Application No. 10-2010-0039496 filed with the Korean Intellectual Property Office on Apr. 28, 2010, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0002] Embodiments of the present invention relate to a thin film deposition apparatus, a method of manufacturing an organic light emitting display device by using the thin film deposition apparatus, and an organic light emitting display device manufactured by using the method. Background technique [0003] The organic light-emitting display device has a larger viewing angle, better contrast characteristics, and faster response rate than other display devices, and thus has attracted attention as a next-generation display device. [0004] An organic light emitting display device generally has a stack structure including an anode, a cathode, and an emission layer disposed between the anode and the cathode. ...

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Problems solved by technology

However, such a structure is difficult to achieve high luminous efficiency, thus selectively additionally disposing an intermediate layer including an electron injection layer, an electron transport layer, a hole transport layer, a hole injection layer, etc. between the emission layer and each between electrodes

[0005] In addition, it is actually very difficult to form fine patterns such as emission layers and intermediate layers in organic thin films, and red light emission efficiency, green light emission efficiency, and blue light emission efficiency vary depending on the organic thin film

For these reasons, it is not easy to form an organic thin film on a large substrate such as a mother glass with a size of 5G or larger by using conventional thin film deposition equipment, thereby making it difficult to fabricate Large organic light-emitting display device with brightness, color purity, luminous efficiency, and lifetime characteristics

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